Matches in SemOpenAlex for { <https://semopenalex.org/work/W3128589637> ?p ?o ?g. }
Showing items 1 to 87 of
87
with 100 items per page.
- W3128589637 endingPage "252" @default.
- W3128589637 startingPage "247" @default.
- W3128589637 abstract "In chemical mechanical planarization (CMP) processes, ceria is generally used as the abrasive . After the CMP process, many ceria particles adhere to the wafer surface and must be removed prior to subsequent processing. In this study, the effect of varied viscosity was investigated during the buffing CMP process for ceria particle removal. After contaminating the wafer surface with ceria slurry, the ceria particles were removed through the buffing CMP process. The wafer surface was analyzed through inductively coupled plasma mass spectrometry (ICP-MS) to confirm cleaning efficiency. The ICP-MS data showed that, as buffing CMP solution viscosity increased, cleaning efficiency improved. These results suggest that increasing the viscosity of the buffing CMP solution improves its effectiveness in removing ceria particles." @default.
- W3128589637 created "2021-02-15" @default.
- W3128589637 creator A5006643526 @default.
- W3128589637 creator A5018674074 @default.
- W3128589637 creator A5021893726 @default.
- W3128589637 creator A5030520232 @default.
- W3128589637 creator A5052683533 @default.
- W3128589637 creator A5077783930 @default.
- W3128589637 creator A5079111207 @default.
- W3128589637 date "2021-02-01" @default.
- W3128589637 modified "2023-09-25" @default.
- W3128589637 title "Effect of Viscosity on Ceria Abrasive Removal in the Buffing CMP Process" @default.
- W3128589637 cites W1977616908 @default.
- W3128589637 cites W2073433607 @default.
- W3128589637 cites W2087929985 @default.
- W3128589637 cites W2166022873 @default.
- W3128589637 cites W2801208733 @default.
- W3128589637 cites W2964571222 @default.
- W3128589637 doi "https://doi.org/10.4028/www.scientific.net/ssp.314.247" @default.
- W3128589637 hasPublicationYear "2021" @default.
- W3128589637 type Work @default.
- W3128589637 sameAs 3128589637 @default.
- W3128589637 citedByCount "0" @default.
- W3128589637 crossrefType "journal-article" @default.
- W3128589637 hasAuthorship W3128589637A5006643526 @default.
- W3128589637 hasAuthorship W3128589637A5018674074 @default.
- W3128589637 hasAuthorship W3128589637A5021893726 @default.
- W3128589637 hasAuthorship W3128589637A5030520232 @default.
- W3128589637 hasAuthorship W3128589637A5052683533 @default.
- W3128589637 hasAuthorship W3128589637A5077783930 @default.
- W3128589637 hasAuthorship W3128589637A5079111207 @default.
- W3128589637 hasConcept C111368507 @default.
- W3128589637 hasConcept C111919701 @default.
- W3128589637 hasConcept C127172972 @default.
- W3128589637 hasConcept C127313418 @default.
- W3128589637 hasConcept C127413603 @default.
- W3128589637 hasConcept C138113353 @default.
- W3128589637 hasConcept C159985019 @default.
- W3128589637 hasConcept C160671074 @default.
- W3128589637 hasConcept C171250308 @default.
- W3128589637 hasConcept C180088628 @default.
- W3128589637 hasConcept C191897082 @default.
- W3128589637 hasConcept C192562407 @default.
- W3128589637 hasConcept C2778517922 @default.
- W3128589637 hasConcept C2780957350 @default.
- W3128589637 hasConcept C41008148 @default.
- W3128589637 hasConcept C42360764 @default.
- W3128589637 hasConcept C94293008 @default.
- W3128589637 hasConcept C98045186 @default.
- W3128589637 hasConceptScore W3128589637C111368507 @default.
- W3128589637 hasConceptScore W3128589637C111919701 @default.
- W3128589637 hasConceptScore W3128589637C127172972 @default.
- W3128589637 hasConceptScore W3128589637C127313418 @default.
- W3128589637 hasConceptScore W3128589637C127413603 @default.
- W3128589637 hasConceptScore W3128589637C138113353 @default.
- W3128589637 hasConceptScore W3128589637C159985019 @default.
- W3128589637 hasConceptScore W3128589637C160671074 @default.
- W3128589637 hasConceptScore W3128589637C171250308 @default.
- W3128589637 hasConceptScore W3128589637C180088628 @default.
- W3128589637 hasConceptScore W3128589637C191897082 @default.
- W3128589637 hasConceptScore W3128589637C192562407 @default.
- W3128589637 hasConceptScore W3128589637C2778517922 @default.
- W3128589637 hasConceptScore W3128589637C2780957350 @default.
- W3128589637 hasConceptScore W3128589637C41008148 @default.
- W3128589637 hasConceptScore W3128589637C42360764 @default.
- W3128589637 hasConceptScore W3128589637C94293008 @default.
- W3128589637 hasConceptScore W3128589637C98045186 @default.
- W3128589637 hasLocation W31285896371 @default.
- W3128589637 hasOpenAccess W3128589637 @default.
- W3128589637 hasPrimaryLocation W31285896371 @default.
- W3128589637 hasRelatedWork W10570272 @default.
- W3128589637 hasRelatedWork W10632816 @default.
- W3128589637 hasRelatedWork W28095478 @default.
- W3128589637 hasRelatedWork W30160081 @default.
- W3128589637 hasRelatedWork W33504529 @default.
- W3128589637 hasRelatedWork W34129894 @default.
- W3128589637 hasRelatedWork W37826912 @default.
- W3128589637 hasRelatedWork W41238891 @default.
- W3128589637 hasRelatedWork W5493150 @default.
- W3128589637 hasRelatedWork W8082996 @default.
- W3128589637 hasVolume "314" @default.
- W3128589637 isParatext "false" @default.
- W3128589637 isRetracted "false" @default.
- W3128589637 magId "3128589637" @default.
- W3128589637 workType "article" @default.