FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W3129500577> ?p ?o ?g. }

• W3129500577 endingPage "28" @default.
• W3129500577 startingPage "23" @default.
• W3129500577 abstract "This paper reports on the application of Rutherford Backscattering Spectrometry (RBS) and Elastic Recoil Detection Analysis (ERDA) using the microbeam system at Tohoku University. The first microbeam RBS/ERDA spectra in this beam line were successfully obtained for microstructured semiconductor devices. The results indicate a clear difference in stoichiometry and thickness after annealing. In addition, a comparison with Time-of-Flight Secondary Ion Mass Spectrometry (ToF-SIMS) analysis is presented." @default.
• W3129500577 created "2021-03-01" @default.
• W3129500577 creator A5016210346 @default.
• W3129500577 creator A5021475982 @default.
• W3129500577 creator A5046514691 @default.
• W3129500577 creator A5050010181 @default.
• W3129500577 creator A5051443911 @default.
• W3129500577 creator A5061986083 @default.
• W3129500577 creator A5066996463 @default.
• W3129500577 date "2021-04-01" @default.
• W3129500577 modified "2023-10-17" @default.
• W3129500577 title "Application of μRBS/ERDA system in microstructured devices" @default.
• W3129500577 cites W2015817966 @default.
• W3129500577 cites W2019346943 @default.
• W3129500577 cites W2033352478 @default.
• W3129500577 cites W2052994650 @default.
• W3129500577 cites W2056535037 @default.
• W3129500577 cites W2061466146 @default.
• W3129500577 cites W2070335749 @default.
• W3129500577 cites W2077207420 @default.
• W3129500577 cites W2094391436 @default.
• W3129500577 cites W2270962481 @default.
• W3129500577 doi "https://doi.org/10.1016/j.nimb.2021.01.017" @default.
• W3129500577 hasPublicationYear "2021" @default.
• W3129500577 type Work @default.
• W3129500577 sameAs 3129500577 @default.
• W3129500577 citedByCount "0" @default.
• W3129500577 crossrefType "journal-article" @default.
• W3129500577 hasAuthorship W3129500577A5016210346 @default.
• W3129500577 hasAuthorship W3129500577A5021475982 @default.
• W3129500577 hasAuthorship W3129500577A5046514691 @default.
• W3129500577 hasAuthorship W3129500577A5050010181 @default.
• W3129500577 hasAuthorship W3129500577A5051443911 @default.
• W3129500577 hasAuthorship W3129500577A5061986083 @default.
• W3129500577 hasAuthorship W3129500577A5066996463 @default.
• W3129500577 hasConcept C113196181 @default.
• W3129500577 hasConcept C120665830 @default.
• W3129500577 hasConcept C121332964 @default.
• W3129500577 hasConcept C136959337 @default.
• W3129500577 hasConcept C142199849 @default.
• W3129500577 hasConcept C159985019 @default.
• W3129500577 hasConcept C162356407 @default.
• W3129500577 hasConcept C168834538 @default.
• W3129500577 hasConcept C16979985 @default.
• W3129500577 hasConcept C171250308 @default.
• W3129500577 hasConcept C185592680 @default.
• W3129500577 hasConcept C19067145 @default.
• W3129500577 hasConcept C191486275 @default.
• W3129500577 hasConcept C192562407 @default.
• W3129500577 hasConcept C2776523803 @default.
• W3129500577 hasConcept C2777152588 @default.
• W3129500577 hasConcept C2777855556 @default.
• W3129500577 hasConcept C2780547777 @default.
• W3129500577 hasConcept C38695641 @default.
• W3129500577 hasConcept C43617362 @default.
• W3129500577 hasConcept C50774322 @default.
• W3129500577 hasConcept C76308580 @default.
• W3129500577 hasConcept C77671233 @default.
• W3129500577 hasConceptScore W3129500577C113196181 @default.
• W3129500577 hasConceptScore W3129500577C120665830 @default.
• W3129500577 hasConceptScore W3129500577C121332964 @default.
• W3129500577 hasConceptScore W3129500577C136959337 @default.
• W3129500577 hasConceptScore W3129500577C142199849 @default.
• W3129500577 hasConceptScore W3129500577C159985019 @default.
• W3129500577 hasConceptScore W3129500577C162356407 @default.
• W3129500577 hasConceptScore W3129500577C168834538 @default.
• W3129500577 hasConceptScore W3129500577C16979985 @default.
• W3129500577 hasConceptScore W3129500577C171250308 @default.
• W3129500577 hasConceptScore W3129500577C185592680 @default.
• W3129500577 hasConceptScore W3129500577C19067145 @default.
• W3129500577 hasConceptScore W3129500577C191486275 @default.
• W3129500577 hasConceptScore W3129500577C192562407 @default.
• W3129500577 hasConceptScore W3129500577C2776523803 @default.
• W3129500577 hasConceptScore W3129500577C2777152588 @default.
• W3129500577 hasConceptScore W3129500577C2777855556 @default.
• W3129500577 hasConceptScore W3129500577C2780547777 @default.
• W3129500577 hasConceptScore W3129500577C38695641 @default.
• W3129500577 hasConceptScore W3129500577C43617362 @default.
• W3129500577 hasConceptScore W3129500577C50774322 @default.
• W3129500577 hasConceptScore W3129500577C76308580 @default.
• W3129500577 hasConceptScore W3129500577C77671233 @default.
• W3129500577 hasLocation W31295005771 @default.
• W3129500577 hasOpenAccess W3129500577 @default.
• W3129500577 hasPrimaryLocation W31295005771 @default.
• W3129500577 hasRelatedWork W148253673 @default.
• W3129500577 hasRelatedWork W1611416446 @default.
• W3129500577 hasRelatedWork W1978708641 @default.
• W3129500577 hasRelatedWork W1981039093 @default.
• W3129500577 hasRelatedWork W2002938838 @default.
• W3129500577 hasRelatedWork W2012624717 @default.
• W3129500577 hasRelatedWork W2041811568 @default.
• W3129500577 hasRelatedWork W2068346546 @default.
• W3129500577 hasRelatedWork W3129500577 @default.
• W3129500577 hasRelatedWork W4288453663 @default.
• W3129500577 hasVolume "492" @default.
• W3129500577 isParatext "false" @default.
• W3129500577 isRetracted "false" @default.
• W3129500577 magId "3129500577" @default.

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