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- W3130607590 abstract "In making sensors require multiple processing by using different masks to accomplish, it needs reload and multiple aligning for a wafer in order to make a functional wafer, thus, the consuming for making mask are wasted, and used lamps toxic. In the study, a ULVLED stepper with Programmable LCoS or DLP as mask for multiple process wafer is proposed. By a programmable ultraviolet light-emitting diode (UVLED) array with a collimated lens as a transfer lens forms uniform source, to expose programmable LCoS or DLP as mask by using a 1 to 1 lithographic lens. Sensors and optical binary lens are easily made." @default.
- W3130607590 created "2021-03-01" @default.
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- W3130607590 date "2021-02-22" @default.
- W3130607590 modified "2023-10-17" @default.
- W3130607590 title "Design ULVLED stepper with programmable reflective display panel as mask for multiple process wafer" @default.
- W3130607590 doi "https://doi.org/10.1117/12.2583817" @default.
- W3130607590 hasPublicationYear "2021" @default.
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