Matches in SemOpenAlex for { <https://semopenalex.org/work/W3130658538> ?p ?o ?g. }
Showing items 1 to 98 of
98
with 100 items per page.
- W3130658538 abstract "Abstract This paper presents a data-based approach for modeling a plasma etch process by estimating etch rate based on controlled input parameters. This work seeks to use an Artificial Neural Network (ANN) model to correlate controlled tool parameters with etch rate and uniformity for a blanket 1100 Å WSiN thin film using Cl2 and BCl3 chemistry. Experimental data was collected using a Lam 9600 PTX plasma metal etch chamber in an industrial cleanroom. The WSiN film was deposited over 3000 Å TEOS to ensure adhesion, with an 8-inch bare silicon wafer as the base layer. Controlled tool parameters were radio frequency (RF) upper electrode power, RF lower electrode power, Cl2 gas flowrate, BCl3 gas flowrate, and chamber pressure. The full factorial design of experiment method was used to select the combinations of experimental configurations. The ANN model was validated using a subset of the training data." @default.
- W3130658538 created "2021-03-01" @default.
- W3130658538 creator A5032776729 @default.
- W3130658538 creator A5049704098 @default.
- W3130658538 creator A5062384186 @default.
- W3130658538 date "2020-11-16" @default.
- W3130658538 modified "2023-09-26" @default.
- W3130658538 title "Data-Based Modeling for Reactive Ion Etching: Effectiveness of an Artificial Neural Network Model for Estimating Tungsten Silicon Nitride Etch Rate" @default.
- W3130658538 doi "https://doi.org/10.1115/imece2020-23992" @default.
- W3130658538 hasPublicationYear "2020" @default.
- W3130658538 type Work @default.
- W3130658538 sameAs 3130658538 @default.
- W3130658538 citedByCount "0" @default.
- W3130658538 crossrefType "proceedings-article" @default.
- W3130658538 hasAuthorship W3130658538A5032776729 @default.
- W3130658538 hasAuthorship W3130658538A5049704098 @default.
- W3130658538 hasAuthorship W3130658538A5062384186 @default.
- W3130658538 hasConcept C100460472 @default.
- W3130658538 hasConcept C113196181 @default.
- W3130658538 hasConcept C119599485 @default.
- W3130658538 hasConcept C119857082 @default.
- W3130658538 hasConcept C121332964 @default.
- W3130658538 hasConcept C124634506 @default.
- W3130658538 hasConcept C127413603 @default.
- W3130658538 hasConcept C130472188 @default.
- W3130658538 hasConcept C147789679 @default.
- W3130658538 hasConcept C159985019 @default.
- W3130658538 hasConcept C160671074 @default.
- W3130658538 hasConcept C169222746 @default.
- W3130658538 hasConcept C172120300 @default.
- W3130658538 hasConcept C17525397 @default.
- W3130658538 hasConcept C185592680 @default.
- W3130658538 hasConcept C191897082 @default.
- W3130658538 hasConcept C192562407 @default.
- W3130658538 hasConcept C194257627 @default.
- W3130658538 hasConcept C196054291 @default.
- W3130658538 hasConcept C24326235 @default.
- W3130658538 hasConcept C2777431650 @default.
- W3130658538 hasConcept C2777859621 @default.
- W3130658538 hasConcept C2779227376 @default.
- W3130658538 hasConcept C2779261148 @default.
- W3130658538 hasConcept C41008148 @default.
- W3130658538 hasConcept C43617362 @default.
- W3130658538 hasConcept C46362747 @default.
- W3130658538 hasConcept C49040817 @default.
- W3130658538 hasConcept C50644808 @default.
- W3130658538 hasConcept C544956773 @default.
- W3130658538 hasConcept C62520636 @default.
- W3130658538 hasConcept C74064498 @default.
- W3130658538 hasConceptScore W3130658538C100460472 @default.
- W3130658538 hasConceptScore W3130658538C113196181 @default.
- W3130658538 hasConceptScore W3130658538C119599485 @default.
- W3130658538 hasConceptScore W3130658538C119857082 @default.
- W3130658538 hasConceptScore W3130658538C121332964 @default.
- W3130658538 hasConceptScore W3130658538C124634506 @default.
- W3130658538 hasConceptScore W3130658538C127413603 @default.
- W3130658538 hasConceptScore W3130658538C130472188 @default.
- W3130658538 hasConceptScore W3130658538C147789679 @default.
- W3130658538 hasConceptScore W3130658538C159985019 @default.
- W3130658538 hasConceptScore W3130658538C160671074 @default.
- W3130658538 hasConceptScore W3130658538C169222746 @default.
- W3130658538 hasConceptScore W3130658538C172120300 @default.
- W3130658538 hasConceptScore W3130658538C17525397 @default.
- W3130658538 hasConceptScore W3130658538C185592680 @default.
- W3130658538 hasConceptScore W3130658538C191897082 @default.
- W3130658538 hasConceptScore W3130658538C192562407 @default.
- W3130658538 hasConceptScore W3130658538C194257627 @default.
- W3130658538 hasConceptScore W3130658538C196054291 @default.
- W3130658538 hasConceptScore W3130658538C24326235 @default.
- W3130658538 hasConceptScore W3130658538C2777431650 @default.
- W3130658538 hasConceptScore W3130658538C2777859621 @default.
- W3130658538 hasConceptScore W3130658538C2779227376 @default.
- W3130658538 hasConceptScore W3130658538C2779261148 @default.
- W3130658538 hasConceptScore W3130658538C41008148 @default.
- W3130658538 hasConceptScore W3130658538C43617362 @default.
- W3130658538 hasConceptScore W3130658538C46362747 @default.
- W3130658538 hasConceptScore W3130658538C49040817 @default.
- W3130658538 hasConceptScore W3130658538C50644808 @default.
- W3130658538 hasConceptScore W3130658538C544956773 @default.
- W3130658538 hasConceptScore W3130658538C62520636 @default.
- W3130658538 hasConceptScore W3130658538C74064498 @default.
- W3130658538 hasLocation W31306585381 @default.
- W3130658538 hasOpenAccess W3130658538 @default.
- W3130658538 hasPrimaryLocation W31306585381 @default.
- W3130658538 hasRelatedWork W12177930 @default.
- W3130658538 hasRelatedWork W13173232 @default.
- W3130658538 hasRelatedWork W15876909 @default.
- W3130658538 hasRelatedWork W2645894 @default.
- W3130658538 hasRelatedWork W32285903 @default.
- W3130658538 hasRelatedWork W34839329 @default.
- W3130658538 hasRelatedWork W37138511 @default.
- W3130658538 hasRelatedWork W37398761 @default.
- W3130658538 hasRelatedWork W39744077 @default.
- W3130658538 hasRelatedWork W48791419 @default.
- W3130658538 isParatext "false" @default.
- W3130658538 isRetracted "false" @default.
- W3130658538 magId "3130658538" @default.
- W3130658538 workType "article" @default.