FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W3130753323> ?p ?o ?g. }

• W3130753323 abstract "Background: Explaining imaging phenomena in EUV lithography requires more than a single point of view. Traditionally, the diffraction characteristics of EUV masks are analyzed in terms of the amplitude and phase of diffraction orders that are generated by the absorber pattern. Aim: We propose a complementary perspective to view the EUV mask absorber openings as waveguides. Approach: Comparisons between RCWA simulations and analytical solutions to waveguide equations are performed to prove that EUV mask absorbers behave as a waveguide. Results: This perspective can explain phenomena left unexplained by conventional analysis of far-field diffraction orders. Conclusions: The waveguiding effect in EUV mask absorbers explains the need for low refractive index and high extinction materials. The waveguide perspective explains why attenuated phase shift masks behave differently for EUV than our traditional understanding would suggest." @default.
• W3130753323 created "2021-03-01" @default.
• W3130753323 creator A5010126078 @default.
• W3130753323 creator A5034339304 @default.
• W3130753323 creator A5043309240 @default.
• W3130753323 creator A5048601537 @default.
• W3130753323 creator A5073523730 @default.
• W3130753323 creator A5083240643 @default.
• W3130753323 date "2021-05-20" @default.
• W3130753323 modified "2023-09-27" @default.
• W3130753323 title "Investigation of waveguide modes in EUV mask absorbers" @default.
• W3130753323 cites W1967011485 @default.
• W3130753323 cites W1974889741 @default.
• W3130753323 cites W1977944608 @default.
• W3130753323 cites W1982327565 @default.
• W3130753323 cites W1985357493 @default.
• W3130753323 cites W1988897202 @default.
• W3130753323 cites W1990993574 @default.
• W3130753323 cites W2033669755 @default.
• W3130753323 cites W2044533055 @default.
• W3130753323 cites W2048887516 @default.
• W3130753323 cites W2049114821 @default.
• W3130753323 cites W2053066651 @default.
• W3130753323 cites W2082958011 @default.
• W3130753323 cites W2088070594 @default.
• W3130753323 cites W2104442192 @default.
• W3130753323 cites W2148045558 @default.
• W3130753323 cites W2163632768 @default.
• W3130753323 cites W2203680237 @default.
• W3130753323 cites W2346466680 @default.
• W3130753323 cites W2613306844 @default.
• W3130753323 cites W2741709812 @default.
• W3130753323 cites W2747465853 @default.
• W3130753323 cites W2791278724 @default.
• W3130753323 cites W2793347300 @default.
• W3130753323 cites W2920912169 @default.
• W3130753323 cites W2921221953 @default.
• W3130753323 cites W2937128203 @default.
• W3130753323 cites W2970672305 @default.
• W3130753323 cites W3013430624 @default.
• W3130753323 cites W3022679605 @default.
• W3130753323 cites W3045263584 @default.
• W3130753323 cites W3091401086 @default.
• W3130753323 doi "https://doi.org/10.1117/1.jmm.20.2.021004" @default.
• W3130753323 hasPublicationYear "2021" @default.
• W3130753323 type Work @default.
• W3130753323 sameAs 3130753323 @default.
• W3130753323 citedByCount "2" @default.
• W3130753323 countsByYear W31307533232023 @default.
• W3130753323 crossrefType "journal-article" @default.
• W3130753323 hasAuthorship W3130753323A5010126078 @default.
• W3130753323 hasAuthorship W3130753323A5034339304 @default.
• W3130753323 hasAuthorship W3130753323A5043309240 @default.
• W3130753323 hasAuthorship W3130753323A5048601537 @default.
• W3130753323 hasAuthorship W3130753323A5073523730 @default.
• W3130753323 hasAuthorship W3130753323A5083240643 @default.
• W3130753323 hasBestOaLocation W31307533231 @default.
• W3130753323 hasConcept C120665830 @default.
• W3130753323 hasConcept C121332964 @default.
• W3130753323 hasConcept C121535716 @default.
• W3130753323 hasConcept C12713177 @default.
• W3130753323 hasConcept C146024833 @default.
• W3130753323 hasConcept C154945302 @default.
• W3130753323 hasConcept C162996421 @default.
• W3130753323 hasConcept C192562407 @default.
• W3130753323 hasConcept C200687136 @default.
• W3130753323 hasConcept C204223013 @default.
• W3130753323 hasConcept C207114421 @default.
• W3130753323 hasConcept C41008148 @default.
• W3130753323 hasConcept C42067758 @default.
• W3130753323 hasConcept C49040817 @default.
• W3130753323 hasConcept C520434653 @default.
• W3130753323 hasConceptScore W3130753323C120665830 @default.
• W3130753323 hasConceptScore W3130753323C121332964 @default.
• W3130753323 hasConceptScore W3130753323C121535716 @default.
• W3130753323 hasConceptScore W3130753323C12713177 @default.
• W3130753323 hasConceptScore W3130753323C146024833 @default.
• W3130753323 hasConceptScore W3130753323C154945302 @default.
• W3130753323 hasConceptScore W3130753323C162996421 @default.
• W3130753323 hasConceptScore W3130753323C192562407 @default.
• W3130753323 hasConceptScore W3130753323C200687136 @default.
• W3130753323 hasConceptScore W3130753323C204223013 @default.
• W3130753323 hasConceptScore W3130753323C207114421 @default.
• W3130753323 hasConceptScore W3130753323C41008148 @default.
• W3130753323 hasConceptScore W3130753323C42067758 @default.
• W3130753323 hasConceptScore W3130753323C49040817 @default.
• W3130753323 hasConceptScore W3130753323C520434653 @default.
• W3130753323 hasIssue "02" @default.
• W3130753323 hasLocation W31307533231 @default.
• W3130753323 hasOpenAccess W3130753323 @default.
• W3130753323 hasPrimaryLocation W31307533231 @default.
• W3130753323 hasRelatedWork W1990897501 @default.
• W3130753323 hasRelatedWork W1996907800 @default.
• W3130753323 hasRelatedWork W2022331525 @default.
• W3130753323 hasRelatedWork W2029848574 @default.
• W3130753323 hasRelatedWork W2040116857 @default.
• W3130753323 hasRelatedWork W2083305308 @default.
• W3130753323 hasRelatedWork W2279324690 @default.
• W3130753323 hasRelatedWork W2532148328 @default.
• W3130753323 hasRelatedWork W3045263584 @default.

• next