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- W3131107172 abstract "Abstract Rapid identification of organic contamination in the semi and semi related industry is a major concern for research and manufacturing. Organic contamination can affect a system or subsystem’s performance and cause premature failure of the product. As an example, in February 2019 the Taiwan Semiconductor Manufacturing Company (TMSC), a major semiconductor manufacturer, reported that a photoresist it used included a specific element which was abnormally treated, creating a foreign polymer in the photoresist resulting in an estimated loss of $550M [1]." @default.
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- W3131107172 date "2020-12-01" @default.
- W3131107172 modified "2023-09-26" @default.
- W3131107172 title "Enhanced Failure Analysis (FA) of Organic Contamination Using Submicron Simultaneous IR and Raman Spectroscopy: Breakthrough Developments of Optical Photothermal IR (O-PTIR)" @default.
- W3131107172 doi "https://doi.org/10.31399/asm.cp.istfa2020p0075" @default.
- W3131107172 hasPublicationYear "2020" @default.
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