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• W3131994823 abstract "We demonstrate the hybrid integration of a lithium niobate microring resonator with a silicon nitride waveguide in the vertical configuration to achieve efficient light coupling. The microring resonator is fabricated on a lithium niobate on insulator (LNOI) substrate using photolithography assisted chemo-mechanical etching (PLACE). A fused silica cladding layer is deposited on the LNOI ring resonator. The silicon nitride waveguide is further produced on the fused silica cladding layer by first fabricating a trench in the fused silica while using focused ion beam (FIB) etching for facilitating the evanescent coupling, followed by the formation of the silicon nitride waveguide on the bottom of the trench. The FIB etching ensures the required high positioning accuracy between the waveguide and ring resonator. We achieve Q-factors as high as 1.4 × 107 with the vertically integrated device." @default.
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• W3131994823 date "2021-02-25" @default.
• W3131994823 modified "2023-09-25" @default.
• W3131994823 title "An Ultra-High-Q Lithium Niobate Microresonator Integrated with a Silicon Nitride Waveguide in the Vertical Configuration for Evanescent Light Coupling" @default.
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• W3131994823 doi "https://doi.org/10.3390/mi12030235" @default.
• W3131994823 hasPubMedCentralId "https://www.ncbi.nlm.nih.gov/pmc/articles/7996522" @default.
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