Matches in SemOpenAlex for { <https://semopenalex.org/work/W3132041212> ?p ?o ?g. }
- W3132041212 endingPage "159100" @default.
- W3132041212 startingPage "159100" @default.
- W3132041212 abstract "Atomic layer deposition of praseodymium oxide (PrOx) films from Pr(thd)3 and O3 as precursors that yielded binary films with non-uniform thicknesses was shown to allow Pr-doping HfO2 films with uniform dopant distributions in the surface plane. The uniform Pr distribution in the sub-monolayer PrOx layers, deposited alternately with HfO2 during synthesis of Pr-doped HfO2, indicates that thickness gradients were developed only in sufficiently thick PrOx films. This result, together with the increase in Pr and Hf mass growth per cycle with an increasing Pr amount in doped HfO2, demonstrates that oxygen absorption in the PrOx-rich material enhanced ALD growth and was a major reason for the formation of thickness gradients in thicker PrOx films grown at temperatures causing the O3 decomposition. Pr-doping of HfO2 stabilized the tetragonal t’ form in the films with Pr/Pr + Hf) atomic ratios ≥ 0.095, while the preferential orientation of the crystal structure depended on the dopant profile in the growth direction. Controlling the doping profile on the atomic layer level enabled the synthesis of Pr-doped HfO2 films which showed markedly higher photoluminescence efficiencies than the films with uniform dopant distribution in the growth direction did." @default.
- W3132041212 created "2021-03-01" @default.
- W3132041212 creator A5021753778 @default.
- W3132041212 creator A5025160651 @default.
- W3132041212 creator A5033137516 @default.
- W3132041212 creator A5033516634 @default.
- W3132041212 creator A5055185943 @default.
- W3132041212 creator A5060675208 @default.
- W3132041212 creator A5067717410 @default.
- W3132041212 date "2021-07-01" @default.
- W3132041212 modified "2023-09-23" @default.
- W3132041212 title "Atomic-layer design and properties of Pr-doped HfO2 thin films" @default.
- W3132041212 cites W1612862975 @default.
- W3132041212 cites W1970944472 @default.
- W3132041212 cites W1978797285 @default.
- W3132041212 cites W1979121079 @default.
- W3132041212 cites W1981040929 @default.
- W3132041212 cites W1981947362 @default.
- W3132041212 cites W1988033585 @default.
- W3132041212 cites W1989429275 @default.
- W3132041212 cites W1989676887 @default.
- W3132041212 cites W1990236874 @default.
- W3132041212 cites W1993422900 @default.
- W3132041212 cites W1994054242 @default.
- W3132041212 cites W2004607082 @default.
- W3132041212 cites W2006474047 @default.
- W3132041212 cites W2008233386 @default.
- W3132041212 cites W2017503603 @default.
- W3132041212 cites W2017882193 @default.
- W3132041212 cites W2019691449 @default.
- W3132041212 cites W2038057553 @default.
- W3132041212 cites W2062465722 @default.
- W3132041212 cites W2063352886 @default.
- W3132041212 cites W2067398333 @default.
- W3132041212 cites W2069763586 @default.
- W3132041212 cites W2070413364 @default.
- W3132041212 cites W2079970838 @default.
- W3132041212 cites W2085749864 @default.
- W3132041212 cites W2088343034 @default.
- W3132041212 cites W2100855467 @default.
- W3132041212 cites W2108105063 @default.
- W3132041212 cites W2114118400 @default.
- W3132041212 cites W2122271644 @default.
- W3132041212 cites W2141399311 @default.
- W3132041212 cites W2157763369 @default.
- W3132041212 cites W2167280427 @default.
- W3132041212 cites W2167590372 @default.
- W3132041212 cites W2234274190 @default.
- W3132041212 cites W2255129396 @default.
- W3132041212 cites W2406871656 @default.
- W3132041212 cites W2475485218 @default.
- W3132041212 cites W2512082066 @default.
- W3132041212 cites W2521495832 @default.
- W3132041212 cites W2530165199 @default.
- W3132041212 cites W2548245046 @default.
- W3132041212 cites W2649837416 @default.
- W3132041212 cites W2797712567 @default.
- W3132041212 cites W2888930948 @default.
- W3132041212 cites W2921103226 @default.
- W3132041212 cites W2951926314 @default.
- W3132041212 cites W2958625442 @default.
- W3132041212 cites W2970266486 @default.
- W3132041212 cites W2975709954 @default.
- W3132041212 cites W2984822607 @default.
- W3132041212 cites W2999129235 @default.
- W3132041212 cites W3031709168 @default.
- W3132041212 cites W3036391117 @default.
- W3132041212 cites W3043752828 @default.
- W3132041212 cites W3076542797 @default.
- W3132041212 cites W3081929399 @default.
- W3132041212 cites W3082283250 @default.
- W3132041212 cites W3082624063 @default.
- W3132041212 cites W3107703994 @default.
- W3132041212 cites W769725329 @default.
- W3132041212 cites W1705478987 @default.
- W3132041212 doi "https://doi.org/10.1016/j.jallcom.2021.159100" @default.
- W3132041212 hasPublicationYear "2021" @default.
- W3132041212 type Work @default.
- W3132041212 sameAs 3132041212 @default.
- W3132041212 citedByCount "3" @default.
- W3132041212 countsByYear W31320412122022 @default.
- W3132041212 crossrefType "journal-article" @default.
- W3132041212 hasAuthorship W3132041212A5021753778 @default.
- W3132041212 hasAuthorship W3132041212A5025160651 @default.
- W3132041212 hasAuthorship W3132041212A5033137516 @default.
- W3132041212 hasAuthorship W3132041212A5033516634 @default.
- W3132041212 hasAuthorship W3132041212A5055185943 @default.
- W3132041212 hasAuthorship W3132041212A5060675208 @default.
- W3132041212 hasAuthorship W3132041212A5067717410 @default.
- W3132041212 hasConcept C113196181 @default.
- W3132041212 hasConcept C115624301 @default.
- W3132041212 hasConcept C170751736 @default.
- W3132041212 hasConcept C171250308 @default.
- W3132041212 hasConcept C185592680 @default.
- W3132041212 hasConcept C19067145 @default.
- W3132041212 hasConcept C191952053 @default.
- W3132041212 hasConcept C192562407 @default.
- W3132041212 hasConcept C2779227376 @default.