Matches in SemOpenAlex for { <https://semopenalex.org/work/W3132918537> ?p ?o ?g. }
- W3132918537 endingPage "7135" @default.
- W3132918537 startingPage "7123" @default.
- W3132918537 abstract "Abstract Metallization layers of aluminum, gold, or copper are shown to be protected from interactions with silicon substrates by thin boron layers grown by chemical-vapor deposition (CVD) at 450 °C. A 3-nm-thick B-layer was studied in detail. It formed the p + -anode region of PureB diodes that have a metallurgic junction depth of zero on n- type Si. The metals were deposited by electron-beam-assisted physical vapor deposition (EBPVD) at room temperature and annealed at temperatures up to 500 °C. In all cases, the B-layer was an effective material barrier between the metal and Si, as verified by practically unchanged PureB diode I–V characteristics and microscopy inspections of the deposited layers. For this result, it was required that the Si surface be clean before B-deposition. Any Si surface contamination was otherwise seen to impede a complete B-coverage giving, sometimes Schottky-like, current increases. For Au, room-temperature interactions with the Si through such pinholes in the B-layer were excessive after the 500 °C anneal." @default.
- W3132918537 created "2021-03-01" @default.
- W3132918537 creator A5023605915 @default.
- W3132918537 creator A5038786894 @default.
- W3132918537 creator A5054100871 @default.
- W3132918537 date "2021-02-18" @default.
- W3132918537 modified "2023-10-18" @default.
- W3132918537 title "Nanometer-thin pure boron CVD layers as material barrier to Au or Cu metallization of Si" @default.
- W3132918537 cites W1545945601 @default.
- W3132918537 cites W1967870030 @default.
- W3132918537 cites W1975034185 @default.
- W3132918537 cites W1975851231 @default.
- W3132918537 cites W1985172780 @default.
- W3132918537 cites W1989994816 @default.
- W3132918537 cites W1990467492 @default.
- W3132918537 cites W2003800854 @default.
- W3132918537 cites W2005502514 @default.
- W3132918537 cites W2006506859 @default.
- W3132918537 cites W2007551590 @default.
- W3132918537 cites W2013525220 @default.
- W3132918537 cites W2058838733 @default.
- W3132918537 cites W2062165634 @default.
- W3132918537 cites W2063947867 @default.
- W3132918537 cites W2064365230 @default.
- W3132918537 cites W2065061383 @default.
- W3132918537 cites W2065437387 @default.
- W3132918537 cites W2068386399 @default.
- W3132918537 cites W2084004496 @default.
- W3132918537 cites W2084118881 @default.
- W3132918537 cites W2134260194 @default.
- W3132918537 cites W2138916156 @default.
- W3132918537 cites W2159501498 @default.
- W3132918537 cites W2163884646 @default.
- W3132918537 cites W2810193971 @default.
- W3132918537 cites W2905490816 @default.
- W3132918537 cites W2938573899 @default.
- W3132918537 cites W2978324072 @default.
- W3132918537 cites W3048059601 @default.
- W3132918537 cites W84172440 @default.
- W3132918537 doi "https://doi.org/10.1007/s10854-021-05422-7" @default.
- W3132918537 hasPublicationYear "2021" @default.
- W3132918537 type Work @default.
- W3132918537 sameAs 3132918537 @default.
- W3132918537 citedByCount "4" @default.
- W3132918537 countsByYear W31329185372021 @default.
- W3132918537 countsByYear W31329185372022 @default.
- W3132918537 countsByYear W31329185372023 @default.
- W3132918537 crossrefType "journal-article" @default.
- W3132918537 hasAuthorship W3132918537A5023605915 @default.
- W3132918537 hasAuthorship W3132918537A5038786894 @default.
- W3132918537 hasAuthorship W3132918537A5054100871 @default.
- W3132918537 hasBestOaLocation W31329185371 @default.
- W3132918537 hasConcept C147789679 @default.
- W3132918537 hasConcept C159985019 @default.
- W3132918537 hasConcept C16115445 @default.
- W3132918537 hasConcept C171250308 @default.
- W3132918537 hasConcept C17525397 @default.
- W3132918537 hasConcept C178790620 @default.
- W3132918537 hasConcept C185592680 @default.
- W3132918537 hasConcept C191897082 @default.
- W3132918537 hasConcept C192562407 @default.
- W3132918537 hasConcept C205200001 @default.
- W3132918537 hasConcept C2779227376 @default.
- W3132918537 hasConcept C49040817 @default.
- W3132918537 hasConcept C501308230 @default.
- W3132918537 hasConcept C513153333 @default.
- W3132918537 hasConcept C544956773 @default.
- W3132918537 hasConcept C57410435 @default.
- W3132918537 hasConcept C77066764 @default.
- W3132918537 hasConcept C78434282 @default.
- W3132918537 hasConcept C89395315 @default.
- W3132918537 hasConceptScore W3132918537C147789679 @default.
- W3132918537 hasConceptScore W3132918537C159985019 @default.
- W3132918537 hasConceptScore W3132918537C16115445 @default.
- W3132918537 hasConceptScore W3132918537C171250308 @default.
- W3132918537 hasConceptScore W3132918537C17525397 @default.
- W3132918537 hasConceptScore W3132918537C178790620 @default.
- W3132918537 hasConceptScore W3132918537C185592680 @default.
- W3132918537 hasConceptScore W3132918537C191897082 @default.
- W3132918537 hasConceptScore W3132918537C192562407 @default.
- W3132918537 hasConceptScore W3132918537C205200001 @default.
- W3132918537 hasConceptScore W3132918537C2779227376 @default.
- W3132918537 hasConceptScore W3132918537C49040817 @default.
- W3132918537 hasConceptScore W3132918537C501308230 @default.
- W3132918537 hasConceptScore W3132918537C513153333 @default.
- W3132918537 hasConceptScore W3132918537C544956773 @default.
- W3132918537 hasConceptScore W3132918537C57410435 @default.
- W3132918537 hasConceptScore W3132918537C77066764 @default.
- W3132918537 hasConceptScore W3132918537C78434282 @default.
- W3132918537 hasConceptScore W3132918537C89395315 @default.
- W3132918537 hasFunder F4320313796 @default.
- W3132918537 hasFunder F4320322674 @default.
- W3132918537 hasIssue "6" @default.
- W3132918537 hasLocation W31329185371 @default.
- W3132918537 hasLocation W31329185372 @default.
- W3132918537 hasLocation W31329185373 @default.
- W3132918537 hasLocation W31329185374 @default.
- W3132918537 hasOpenAccess W3132918537 @default.