Matches in SemOpenAlex for { <https://semopenalex.org/work/W3132933428> ?p ?o ?g. }
Showing items 1 to 79 of
79
with 100 items per page.
- W3132933428 endingPage "1377" @default.
- W3132933428 startingPage "1377" @default.
- W3132933428 abstract "In this paper, we propose spatiotemporal modulation projection lithography (STPL) technology, which is a spatiotemporal modulation technology applied to the conventional digital micromirror device (DMD) projection lithography system. Through coordinating the micro-movement of the piezoelectric stage, the flexible pattern generation of DMD, and the exposure time, the proposed STPL enables us to fabricate a microstructure with smooth edges, accurate linewidth, and accurate line position. Further application on fabricating a diffraction lens has been implemented. The edge sawtooth of the Fresnel zone plate fabricated by using the STPL is reduced to 0.3 µm, the error between the actual measured linewidth and the ideal linewidth is only within <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML display=inline> <mml:mrow class=MJX-TeXAtom-ORD> <mml:mrow class=MJX-TeXAtom-ORD> <mml:mo>±<!-- ± --></mml:mo> <mml:mn>0.1</mml:mn> </mml:mrow> </mml:mrow> <mml:mspace width=thickmathspace /> <mml:mtext>µ<!-- µ --></mml:mtext> <mml:mrow class=MJX-TeXAtom-ORD> <mml:mi mathvariant=normal>m</mml:mi> </mml:mrow> </mml:math> , and the focal length is 15 mm, which is basically consistent with the designed focal length. These results indicated that STPL can serve a significant role in the micromanufacturing field for achieving high-fidelity microdevices." @default.
- W3132933428 created "2021-03-01" @default.
- W3132933428 creator A5027859501 @default.
- W3132933428 creator A5041351358 @default.
- W3132933428 creator A5047032928 @default.
- W3132933428 creator A5070399374 @default.
- W3132933428 creator A5070503574 @default.
- W3132933428 creator A5090948294 @default.
- W3132933428 date "2021-03-10" @default.
- W3132933428 modified "2023-09-24" @default.
- W3132933428 title "Lithographic pattern quality enhancement of DMD lithography with spatiotemporal modulated technology" @default.
- W3132933428 cites W1974416320 @default.
- W3132933428 cites W1979551322 @default.
- W3132933428 cites W2016892218 @default.
- W3132933428 cites W2092016229 @default.
- W3132933428 cites W2122756325 @default.
- W3132933428 cites W2123531213 @default.
- W3132933428 cites W2138586917 @default.
- W3132933428 cites W2560595669 @default.
- W3132933428 cites W2752827440 @default.
- W3132933428 cites W2823448202 @default.
- W3132933428 cites W2964275980 @default.
- W3132933428 cites W2980431848 @default.
- W3132933428 cites W3108621528 @default.
- W3132933428 doi "https://doi.org/10.1364/ol.415788" @default.
- W3132933428 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/33720191" @default.
- W3132933428 hasPublicationYear "2021" @default.
- W3132933428 type Work @default.
- W3132933428 sameAs 3132933428 @default.
- W3132933428 citedByCount "16" @default.
- W3132933428 countsByYear W31329334282021 @default.
- W3132933428 countsByYear W31329334282022 @default.
- W3132933428 countsByYear W31329334282023 @default.
- W3132933428 crossrefType "journal-article" @default.
- W3132933428 hasAuthorship W3132933428A5027859501 @default.
- W3132933428 hasAuthorship W3132933428A5041351358 @default.
- W3132933428 hasAuthorship W3132933428A5047032928 @default.
- W3132933428 hasAuthorship W3132933428A5070399374 @default.
- W3132933428 hasAuthorship W3132933428A5070503574 @default.
- W3132933428 hasAuthorship W3132933428A5090948294 @default.
- W3132933428 hasConcept C11413529 @default.
- W3132933428 hasConcept C120665830 @default.
- W3132933428 hasConcept C121332964 @default.
- W3132933428 hasConcept C142181693 @default.
- W3132933428 hasConcept C192562407 @default.
- W3132933428 hasConcept C204223013 @default.
- W3132933428 hasConcept C41008148 @default.
- W3132933428 hasConcept C520434653 @default.
- W3132933428 hasConceptScore W3132933428C11413529 @default.
- W3132933428 hasConceptScore W3132933428C120665830 @default.
- W3132933428 hasConceptScore W3132933428C121332964 @default.
- W3132933428 hasConceptScore W3132933428C142181693 @default.
- W3132933428 hasConceptScore W3132933428C192562407 @default.
- W3132933428 hasConceptScore W3132933428C204223013 @default.
- W3132933428 hasConceptScore W3132933428C41008148 @default.
- W3132933428 hasConceptScore W3132933428C520434653 @default.
- W3132933428 hasFunder F4320321001 @default.
- W3132933428 hasFunder F4320335953 @default.
- W3132933428 hasIssue "6" @default.
- W3132933428 hasLocation W31329334281 @default.
- W3132933428 hasOpenAccess W3132933428 @default.
- W3132933428 hasPrimaryLocation W31329334281 @default.
- W3132933428 hasRelatedWork W1988679553 @default.
- W3132933428 hasRelatedWork W2057158629 @default.
- W3132933428 hasRelatedWork W2059927967 @default.
- W3132933428 hasRelatedWork W2062432918 @default.
- W3132933428 hasRelatedWork W2080027931 @default.
- W3132933428 hasRelatedWork W2098749959 @default.
- W3132933428 hasRelatedWork W2114940054 @default.
- W3132933428 hasRelatedWork W2155246362 @default.
- W3132933428 hasRelatedWork W2748952813 @default.
- W3132933428 hasRelatedWork W2899084033 @default.
- W3132933428 hasVolume "46" @default.
- W3132933428 isParatext "false" @default.
- W3132933428 isRetracted "false" @default.
- W3132933428 magId "3132933428" @default.
- W3132933428 workType "article" @default.