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• W3133690622 abstract "Atomic layer deposition (ALD) of aluminum nitride (AlN) using in situ atomic layer annealing (ALA) is studied for microelectromechanical systems (MEMS). Effective piezoelectric in-plane actuation and sensing requires deposition of high crystal quality and (0002) oriented AlN on vertical sidewalls of MEMS structures. Previous studies have shown that the crystal quality of ALD AlN can be significantly improved using ALA but have not studied the conformal coverage or crystal quality on metal electrodes, which are required for piezoelectric MEMS devices. In this study, AlN thin films are deposited on Si, Al, Pt, and on vertical sidewalls etched into Si. The AlN microstructure and properties are studied using x-ray diffraction methods, transmission electron microscopy, and Fourier transform infrared spectroscopy. The conformal coverage is evaluated by measuring the film thickness on the vertical sidewalls. The effects of postdeposition annealing are studied as well. This study aims to enable effective piezoelectric actuation and sensing for MEMS sensors. The conformal coverage of the ALA ALD process is excellent and AlN has the best crystal quality and degree of orientation when deposited on Al. The as-deposited films contain oxygen impurities, which might be detrimental to the piezoelectric properties of AlN. Annealing at high temperatures reduced the number of impurities but did not improve the crystal quality." @default.
• W3133690622 created "2021-03-15" @default.
• W3133690622 creator A5050380431 @default.
• W3133690622 creator A5052876062 @default.
• W3133690622 creator A5066609050 @default.
• W3133690622 creator A5082075295 @default.
• W3133690622 creator A5082648035 @default.
• W3133690622 date "2021-03-08" @default.
• W3133690622 modified "2023-09-24" @default.
• W3133690622 title "Atomic layer deposition of AlN using atomic layer annealing—Towards high-quality AlN on vertical sidewalls" @default.
• W3133690622 cites W1194156735 @default.
• W3133690622 cites W1971712552 @default.
• W3133690622 cites W1973821320 @default.
• W3133690622 cites W1976407798 @default.
• W3133690622 cites W2001055489 @default.
• W3133690622 cites W2002854004 @default.
• W3133690622 cites W2006129225 @default.
• W3133690622 cites W2007446025 @default.
• W3133690622 cites W2010622612 @default.
• W3133690622 cites W2015261837 @default.
• W3133690622 cites W2018409502 @default.
• W3133690622 cites W2018750909 @default.
• W3133690622 cites W2018835282 @default.
• W3133690622 cites W2019103891 @default.
• W3133690622 cites W2025409054 @default.
• W3133690622 cites W2033562417 @default.
• W3133690622 cites W2037462549 @default.
• W3133690622 cites W2039513356 @default.
• W3133690622 cites W2043289735 @default.
• W3133690622 cites W2048909548 @default.
• W3133690622 cites W2053214712 @default.
• W3133690622 cites W2068366932 @default.
• W3133690622 cites W2079643374 @default.
• W3133690622 cites W2081044834 @default.
• W3133690622 cites W2082050360 @default.
• W3133690622 cites W2088318260 @default.
• W3133690622 cites W2104659333 @default.
• W3133690622 cites W2112349959 @default.
• W3133690622 cites W2122040601 @default.
• W3133690622 cites W2127626795 @default.
• W3133690622 cites W2128659391 @default.
• W3133690622 cites W2152556462 @default.
• W3133690622 cites W2153063279 @default.
• W3133690622 cites W2162947331 @default.
• W3133690622 cites W2163861557 @default.
• W3133690622 cites W2168840227 @default.
• W3133690622 cites W2318537644 @default.
• W3133690622 cites W2419246382 @default.
• W3133690622 cites W2580767461 @default.
• W3133690622 cites W2885602979 @default.
• W3133690622 cites W2891423951 @default.
• W3133690622 cites W2911586105 @default.
• W3133690622 cites W2912885185 @default.
• W3133690622 cites W2988673310 @default.
• W3133690622 cites W3038890293 @default.
• W3133690622 cites W3046372362 @default.
• W3133690622 cites W3133690622 @default.
• W3133690622 cites W4252113768 @default.
• W3133690622 cites W8327635 @default.
• W3133690622 doi "https://doi.org/10.1116/6.0000724" @default.
• W3133690622 hasPublicationYear "2021" @default.
• W3133690622 type Work @default.
• W3133690622 sameAs 3133690622 @default.
• W3133690622 citedByCount "11" @default.
• W3133690622 countsByYear W31336906222021 @default.
• W3133690622 countsByYear W31336906222022 @default.
• W3133690622 countsByYear W31336906222023 @default.
• W3133690622 crossrefType "journal-article" @default.
• W3133690622 hasAuthorship W3133690622A5050380431 @default.
• W3133690622 hasAuthorship W3133690622A5052876062 @default.
• W3133690622 hasAuthorship W3133690622A5066609050 @default.
• W3133690622 hasAuthorship W3133690622A5082075295 @default.
• W3133690622 hasAuthorship W3133690622A5082648035 @default.
• W3133690622 hasBestOaLocation W31336906221 @default.
• W3133690622 hasConcept C100082104 @default.
• W3133690622 hasConcept C159985019 @default.
• W3133690622 hasConcept C171250308 @default.
• W3133690622 hasConcept C19067145 @default.
• W3133690622 hasConcept C192562407 @default.
• W3133690622 hasConcept C194760766 @default.
• W3133690622 hasConcept C199360897 @default.
• W3133690622 hasConcept C2777855556 @default.
• W3133690622 hasConcept C2779227376 @default.
• W3133690622 hasConcept C2781285689 @default.
• W3133690622 hasConcept C37977207 @default.
• W3133690622 hasConcept C41008148 @default.
• W3133690622 hasConcept C49040817 @default.
• W3133690622 hasConcept C69544855 @default.
• W3133690622 hasConceptScore W3133690622C100082104 @default.
• W3133690622 hasConceptScore W3133690622C159985019 @default.
• W3133690622 hasConceptScore W3133690622C171250308 @default.
• W3133690622 hasConceptScore W3133690622C19067145 @default.
• W3133690622 hasConceptScore W3133690622C192562407 @default.
• W3133690622 hasConceptScore W3133690622C194760766 @default.
• W3133690622 hasConceptScore W3133690622C199360897 @default.
• W3133690622 hasConceptScore W3133690622C2777855556 @default.
• W3133690622 hasConceptScore W3133690622C2779227376 @default.
• W3133690622 hasConceptScore W3133690622C2781285689 @default.
• W3133690622 hasConceptScore W3133690622C37977207 @default.
• W3133690622 hasConceptScore W3133690622C41008148 @default.

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