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- W3133748073 abstract "Abstract In the industry of manufacturing photo mask of Liquid Crystal Display (LCD) or Vacuum Florescent Display (VFD), there have been strong needs for a CAD system of fabricating a pattern mask directly from the CAD data of 2D mask design. This paper presents brief introductions to several algorithms and implementations used in the development of a CAD system for LCD/VFD mask fabrication. For the laser writer, it is simply required to provide the loop information of the pattern shapes. The ray casting algorithm is applied to derive this loop information from the CAD data composed of random vector list. For the photo plotter, the selection of the proper apertures and their plotting paths are derived to expose exact pattern shapes in the shortest time. The idea of Voronoi diagram is used to efficiently obtain an exact aperture path in this study. This paper also features some ideas for automatically detecting and fixing errors of designer’s drawing." @default.
- W3133748073 created "2021-03-15" @default.
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- W3133748073 date "1996-08-18" @default.
- W3133748073 modified "2023-09-25" @default.
- W3133748073 title "Development of CAD System for the Fabrication of LCD/VFD Mask From 2D CAD Data" @default.
- W3133748073 doi "https://doi.org/10.1115/96-detc/dac-1068" @default.
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