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- W3134187812 abstract "The experimental investigation of the effects of key vibration parameters including vibration mode, frequency, and amplitude on vibration-assisted tip-based nanofabrication (VTBN) is presented in this paper. To analyze the detailed effects, the experiments were specifically designed with the general factorial method. The experiments are conducted with a self-developed 3D ultrasonic VTBN system, which integrates a 3-DOF tip-based nanofabrication system and a 3D ultrasonic vibration platform. According to the experimental results, three parameters are all significant factors of the responses of single scratch. On the whole, the fabricated grooves with 2D vibration in x−y plane have the largest depth and widest width. Moreover, the vibrations with 1D vibration in x-axis and 2D vibration in x−y plane add to the width controllability of single scratch by tuning the amplitude of the component in the x-axis. The vibration amplitude has an almost linear relationship between the responses and the factors. Finally, to verify the accuracy and effectiveness of the established model, a validation test is conducted. The results show that the maximum error for the depth and the width between the model and the result is less than 8%, which validates the effectiveness of the method." @default.
- W3134187812 created "2021-03-15" @default.
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- W3134187812 date "2021-05-01" @default.
- W3134187812 modified "2023-10-16" @default.
- W3134187812 title "Experimental investigation of the effects of vibration parameters on ultrasonic vibration-assisted tip-based nanofabrication" @default.
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- W3134187812 doi "https://doi.org/10.1016/j.ijmecsci.2021.106387" @default.
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