Matches in SemOpenAlex for { <https://semopenalex.org/work/W3134724670> ?p ?o ?g. }
Showing items 1 to 85 of
85
with 100 items per page.
- W3134724670 abstract "Piezoelectric thin films have gained attention as key materials for the actuation of micro devices since they provide high drive forces compared to others actuation mechanisms. One of the most challenging application field is the design of quasistatic MEMS scanners, in which is difficult to have a high torsional angle and large reflective area while maintaining a good device robustness. In this work a monoaxial, quasi-static MEMS mirror with PZT actuation will be presented, surpassing the limitations found in the state-of-the-art solutions. The mirror has a large reflective area in the visible spectrum (4x3mm with aluminum coating) and the half mechanical opening angle is of 9deg (corresponding to a field of view of 36deg) with a relatively low actuation voltage (40V). To enable the mirror control, a diffused piezoresistive sensor in a Wheatstone bridge configuration is integrated in the technology platform. The innovative mirror design guarantees high resonant frequencies of the torsional mode (>500Hz) and higher spurious modes (>2.5kHz), which allow a quasistatic actuation for the typical display refresh rates (up to 120Hz). The high frequencies of the translational spurious modes guarantee a high robustness against shocks and vibrations, which makes this mirror suitable for consumer or automotive products. In this paper it will be described the working principle of the patented MEMS design, the manufacturing process, the FEM simulations and the experimental findings obtained on fabricated samples." @default.
- W3134724670 created "2021-03-15" @default.
- W3134724670 creator A5011023819 @default.
- W3134724670 creator A5020081274 @default.
- W3134724670 creator A5021091091 @default.
- W3134724670 creator A5052449661 @default.
- W3134724670 date "2021-03-05" @default.
- W3134724670 modified "2023-10-17" @default.
- W3134724670 title "Quasi-static PZT actuated MEMS mirror with 4x3mm2 reflective area and high robustness" @default.
- W3134724670 cites W1997023630 @default.
- W3134724670 cites W3001039664 @default.
- W3134724670 doi "https://doi.org/10.1117/12.2576526" @default.
- W3134724670 hasPublicationYear "2021" @default.
- W3134724670 type Work @default.
- W3134724670 sameAs 3134724670 @default.
- W3134724670 citedByCount "4" @default.
- W3134724670 countsByYear W31347246702021 @default.
- W3134724670 countsByYear W31347246702022 @default.
- W3134724670 countsByYear W31347246702023 @default.
- W3134724670 crossrefType "proceedings-article" @default.
- W3134724670 hasAuthorship W3134724670A5011023819 @default.
- W3134724670 hasAuthorship W3134724670A5020081274 @default.
- W3134724670 hasAuthorship W3134724670A5021091091 @default.
- W3134724670 hasAuthorship W3134724670A5052449661 @default.
- W3134724670 hasConcept C100082104 @default.
- W3134724670 hasConcept C104317684 @default.
- W3134724670 hasConcept C104713690 @default.
- W3134724670 hasConcept C119599485 @default.
- W3134724670 hasConcept C121332964 @default.
- W3134724670 hasConcept C127413603 @default.
- W3134724670 hasConcept C137488568 @default.
- W3134724670 hasConcept C159985019 @default.
- W3134724670 hasConcept C165801399 @default.
- W3134724670 hasConcept C172707124 @default.
- W3134724670 hasConcept C185592680 @default.
- W3134724670 hasConcept C192562407 @default.
- W3134724670 hasConcept C198490522 @default.
- W3134724670 hasConcept C24326235 @default.
- W3134724670 hasConcept C24890656 @default.
- W3134724670 hasConcept C37977207 @default.
- W3134724670 hasConcept C41008148 @default.
- W3134724670 hasConcept C4708273 @default.
- W3134724670 hasConcept C49040817 @default.
- W3134724670 hasConcept C55493867 @default.
- W3134724670 hasConcept C62520636 @default.
- W3134724670 hasConcept C63479239 @default.
- W3134724670 hasConceptScore W3134724670C100082104 @default.
- W3134724670 hasConceptScore W3134724670C104317684 @default.
- W3134724670 hasConceptScore W3134724670C104713690 @default.
- W3134724670 hasConceptScore W3134724670C119599485 @default.
- W3134724670 hasConceptScore W3134724670C121332964 @default.
- W3134724670 hasConceptScore W3134724670C127413603 @default.
- W3134724670 hasConceptScore W3134724670C137488568 @default.
- W3134724670 hasConceptScore W3134724670C159985019 @default.
- W3134724670 hasConceptScore W3134724670C165801399 @default.
- W3134724670 hasConceptScore W3134724670C172707124 @default.
- W3134724670 hasConceptScore W3134724670C185592680 @default.
- W3134724670 hasConceptScore W3134724670C192562407 @default.
- W3134724670 hasConceptScore W3134724670C198490522 @default.
- W3134724670 hasConceptScore W3134724670C24326235 @default.
- W3134724670 hasConceptScore W3134724670C24890656 @default.
- W3134724670 hasConceptScore W3134724670C37977207 @default.
- W3134724670 hasConceptScore W3134724670C41008148 @default.
- W3134724670 hasConceptScore W3134724670C4708273 @default.
- W3134724670 hasConceptScore W3134724670C49040817 @default.
- W3134724670 hasConceptScore W3134724670C55493867 @default.
- W3134724670 hasConceptScore W3134724670C62520636 @default.
- W3134724670 hasConceptScore W3134724670C63479239 @default.
- W3134724670 hasLocation W31347246701 @default.
- W3134724670 hasOpenAccess W3134724670 @default.
- W3134724670 hasPrimaryLocation W31347246701 @default.
- W3134724670 hasRelatedWork W1565614534 @default.
- W3134724670 hasRelatedWork W2001564386 @default.
- W3134724670 hasRelatedWork W2022753432 @default.
- W3134724670 hasRelatedWork W2092868632 @default.
- W3134724670 hasRelatedWork W2572227283 @default.
- W3134724670 hasRelatedWork W2912682349 @default.
- W3134724670 hasRelatedWork W3113492905 @default.
- W3134724670 hasRelatedWork W3134724670 @default.
- W3134724670 hasRelatedWork W3156683774 @default.
- W3134724670 hasRelatedWork W88042380 @default.
- W3134724670 isParatext "false" @default.
- W3134724670 isRetracted "false" @default.
- W3134724670 magId "3134724670" @default.
- W3134724670 workType "article" @default.