FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W3134776935> ?p ?o ?g. }

• W3134776935 endingPage "1526" @default.
• W3134776935 startingPage "1516" @default.
• W3134776935 abstract "We examine a scheduling problem for a dual-armed cluster tool that processes multiple similar wafer types concurrently. It has been recently proved that the well-known swap sequence, which is widely used for single wafer type processing, also minimizes the cycle time for concurrent processing. In this article, we wish to minimize wafer delays in a process chamber, which are critical to wafer quality degradation, while maintaining the minimum cycle time. In particular, we show that concurrent processing of wafers with different processing times complicates the analysis of wafer delays significantly, and the wafer delays can be remarkably reduced by finding a proper cycle plan which is the release sequence of different wafer types. We first characterize wafer delays for a given cycle plan by analyzing the circuits of the timed event graph (TEG) model. From this, we prove that concurrent processing of wafers may cause a significant workload imbalance between parallel chambers of a process step, and hence the wafer delays increase substantially. We present that the wafer delays are minimized by a cycle plan that evenly balances workloads between parallel chambers. We also propose how wafer loading task at each process step has to be postponed to meet wafer delay constraints while maintaining the minimum cycle time. <italic xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>Note to Practitioners</i> —Wafer quality control has become an essential fab operational problem in semiconductor manufacturing industry. In cluster tools, which are dominantly being used for diverse wafer fabrication stages, it has been proven that the wafer delays within process chambers have a crucial impact on the wafer quality. Accordingly, modern fabs have introduced stringent quality control to regulate wafer delays in cluster tools. In this research, we propose a scheduling strategy to minimize the wafer delays when a cluster tool concurrently processes multiple wafer types. We first show that the release sequence of different wafer types significantly impacts the wafer delays under concurrent processing, and we then propose how these wafer delays can be minimized by finding the optimal wafer release sequence." @default.
• W3134776935 created "2021-03-15" @default.
• W3134776935 creator A5014167840 @default.
• W3134776935 creator A5035991100 @default.
• W3134776935 creator A5048032116 @default.
• W3134776935 date "2021-07-01" @default.
• W3134776935 modified "2023-10-03" @default.
• W3134776935 title "Wafer Delay Analysis and Workload Balancing of Parallel Chambers for Dual-Armed Cluster Tools With Multiple Wafer Types" @default.
• W3134776935 cites W1984672920 @default.
• W3134776935 cites W1984750145 @default.
• W3134776935 cites W1996109622 @default.
• W3134776935 cites W2002235729 @default.
• W3134776935 cites W2012448698 @default.
• W3134776935 cites W2017894321 @default.
• W3134776935 cites W2019063470 @default.
• W3134776935 cites W2033764666 @default.
• W3134776935 cites W2038432358 @default.
• W3134776935 cites W2041853864 @default.
• W3134776935 cites W2069533734 @default.
• W3134776935 cites W2073229720 @default.
• W3134776935 cites W2086414784 @default.
• W3134776935 cites W2096355648 @default.
• W3134776935 cites W2106659191 @default.
• W3134776935 cites W2110050374 @default.
• W3134776935 cites W2115936082 @default.
• W3134776935 cites W2117906302 @default.
• W3134776935 cites W2127104083 @default.
• W3134776935 cites W2137987710 @default.
• W3134776935 cites W2157758041 @default.
• W3134776935 cites W2159411172 @default.
• W3134776935 cites W2164448196 @default.
• W3134776935 cites W2320942828 @default.
• W3134776935 cites W2331742122 @default.
• W3134776935 cites W2332655870 @default.
• W3134776935 cites W2342897103 @default.
• W3134776935 cites W2344326925 @default.
• W3134776935 cites W2394698730 @default.
• W3134776935 cites W2511769035 @default.
• W3134776935 cites W2523482717 @default.
• W3134776935 cites W2529540870 @default.
• W3134776935 cites W2583593438 @default.
• W3134776935 cites W2597321818 @default.
• W3134776935 cites W2730944878 @default.
• W3134776935 cites W2739664263 @default.
• W3134776935 cites W2776443426 @default.
• W3134776935 cites W2794006557 @default.
• W3134776935 cites W2884307365 @default.
• W3134776935 cites W2893504464 @default.
• W3134776935 cites W2896759506 @default.
• W3134776935 cites W2901776478 @default.
• W3134776935 cites W2922579413 @default.
• W3134776935 cites W4242037947 @default.
• W3134776935 cites W4251585772 @default.
• W3134776935 doi "https://doi.org/10.1109/tase.2021.3061140" @default.
• W3134776935 hasPublicationYear "2021" @default.
• W3134776935 type Work @default.
• W3134776935 sameAs 3134776935 @default.
• W3134776935 citedByCount "8" @default.
• W3134776935 countsByYear W31347769352021 @default.
• W3134776935 countsByYear W31347769352022 @default.
• W3134776935 countsByYear W31347769352023 @default.
• W3134776935 crossrefType "journal-article" @default.
• W3134776935 hasAuthorship W3134776935A5014167840 @default.
• W3134776935 hasAuthorship W3134776935A5035991100 @default.
• W3134776935 hasAuthorship W3134776935A5048032116 @default.
• W3134776935 hasConcept C119599485 @default.
• W3134776935 hasConcept C127413603 @default.
• W3134776935 hasConcept C149635348 @default.
• W3134776935 hasConcept C160671074 @default.
• W3134776935 hasConcept C200601418 @default.
• W3134776935 hasConcept C206729178 @default.
• W3134776935 hasConcept C21547014 @default.
• W3134776935 hasConcept C35750839 @default.
• W3134776935 hasConcept C41008148 @default.
• W3134776935 hasConcept C66018809 @default.
• W3134776935 hasConcept C79403827 @default.
• W3134776935 hasConceptScore W3134776935C119599485 @default.
• W3134776935 hasConceptScore W3134776935C127413603 @default.
• W3134776935 hasConceptScore W3134776935C149635348 @default.
• W3134776935 hasConceptScore W3134776935C160671074 @default.
• W3134776935 hasConceptScore W3134776935C200601418 @default.
• W3134776935 hasConceptScore W3134776935C206729178 @default.
• W3134776935 hasConceptScore W3134776935C21547014 @default.
• W3134776935 hasConceptScore W3134776935C35750839 @default.
• W3134776935 hasConceptScore W3134776935C41008148 @default.
• W3134776935 hasConceptScore W3134776935C66018809 @default.
• W3134776935 hasConceptScore W3134776935C79403827 @default.
• W3134776935 hasFunder F4320311649 @default.
• W3134776935 hasFunder F4320322120 @default.
• W3134776935 hasIssue "3" @default.
• W3134776935 hasLocation W31347769351 @default.
• W3134776935 hasOpenAccess W3134776935 @default.
• W3134776935 hasPrimaryLocation W31347769351 @default.
• W3134776935 hasRelatedWork W1483119123 @default.
• W3134776935 hasRelatedWork W1964736065 @default.
• W3134776935 hasRelatedWork W1977521216 @default.
• W3134776935 hasRelatedWork W1989854233 @default.
• W3134776935 hasRelatedWork W2018048930 @default.

• next