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- W3135529172 abstract "Scandium-alloying of aluminum nitride (AlScN) enhances the piezoelectric properties of the material and increases the performance of piezoelectric microelectromechanical systems (MEMS). However, this enhancement is caused by the destabilization of the wurtzite phase and so far the stability of AlScN thin films has not been sufficiently studied. Stability is especially important for piezoelectric devices because changes to the film microstructure or residual stress can lead to drastic changes in the device behavior. The stability of AlScN is investigated by annealing sputtered films and characterizing the resulting changes. It is found that the wurtzite phase of ${mathrm{Al}}_{0.7}{mathrm{Sc}}_{0.3}mathrm{N}$ is stable at least up to $1000{phantom{rule{0.16em}{0ex}}}^{ensuremath{circ}}mathrm{C}$ and annealing increases the crystal quality, reaching a maximum at $800{phantom{rule{0.16em}{0ex}}}^{ensuremath{circ}}mathrm{C}$. When annealed for more than 100 h at $1000{phantom{rule{0.16em}{0ex}}}^{ensuremath{circ}}mathrm{C}$, argon used in sputtering segregates into the grain boundaries and causes compressive strains and formation of rock-salt phase. Additionally, annealing at $1000{phantom{rule{0.16em}{0ex}}}^{ensuremath{circ}}mathrm{C}$ for 5 h reduces the average tensile stress by approximately 1 GPa." @default.
- W3135529172 created "2021-03-15" @default.
- W3135529172 creator A5001015244 @default.
- W3135529172 creator A5033817056 @default.
- W3135529172 creator A5039319849 @default.
- W3135529172 creator A5044182171 @default.
- W3135529172 creator A5047585026 @default.
- W3135529172 creator A5052876062 @default.
- W3135529172 creator A5057407211 @default.
- W3135529172 creator A5075740697 @default.
- W3135529172 creator A5079797770 @default.
- W3135529172 creator A5082075295 @default.
- W3135529172 creator A5089206099 @default.
- W3135529172 creator A5091385056 @default.
- W3135529172 date "2021-03-02" @default.
- W3135529172 modified "2023-10-15" @default.
- W3135529172 title "Stability and residual stresses of sputtered wurtzite AlScN thin films" @default.
- W3135529172 cites W1035921528 @default.
- W3135529172 cites W1615674886 @default.
- W3135529172 cites W170916093 @default.
- W3135529172 cites W1946007549 @default.
- W3135529172 cites W1967022370 @default.
- W3135529172 cites W1967363792 @default.
- W3135529172 cites W1971752559 @default.
- W3135529172 cites W1972074028 @default.
- W3135529172 cites W1975033820 @default.
- W3135529172 cites W1976407798 @default.
- W3135529172 cites W1979544533 @default.
- W3135529172 cites W1981368803 @default.
- W3135529172 cites W1982074532 @default.
- W3135529172 cites W2006503382 @default.
- W3135529172 cites W200795822 @default.
- W3135529172 cites W2014398400 @default.
- W3135529172 cites W2018750909 @default.
- W3135529172 cites W2037338257 @default.
- W3135529172 cites W2037409890 @default.
- W3135529172 cites W2047165001 @default.
- W3135529172 cites W2052957806 @default.
- W3135529172 cites W2053618502 @default.
- W3135529172 cites W2061976368 @default.
- W3135529172 cites W2062161678 @default.
- W3135529172 cites W2072945956 @default.
- W3135529172 cites W2076379803 @default.
- W3135529172 cites W2082050360 @default.
- W3135529172 cites W2082724679 @default.
- W3135529172 cites W2083222334 @default.
- W3135529172 cites W2086933933 @default.
- W3135529172 cites W2093245450 @default.
- W3135529172 cites W2094893736 @default.
- W3135529172 cites W2096105657 @default.
- W3135529172 cites W2116547927 @default.
- W3135529172 cites W2125384567 @default.
- W3135529172 cites W2149961875 @default.
- W3135529172 cites W2153695139 @default.
- W3135529172 cites W2318537644 @default.
- W3135529172 cites W2552441801 @default.
- W3135529172 cites W2736977214 @default.
- W3135529172 cites W2751944108 @default.
- W3135529172 cites W2752894000 @default.
- W3135529172 cites W2762029852 @default.
- W3135529172 cites W2810308997 @default.
- W3135529172 cites W2884988407 @default.
- W3135529172 cites W3101930641 @default.
- W3135529172 cites W410782996 @default.
- W3135529172 doi "https://doi.org/10.1103/physrevmaterials.5.035001" @default.
- W3135529172 hasPublicationYear "2021" @default.
- W3135529172 type Work @default.
- W3135529172 sameAs 3135529172 @default.
- W3135529172 citedByCount "14" @default.
- W3135529172 countsByYear W31355291722022 @default.
- W3135529172 countsByYear W31355291722023 @default.
- W3135529172 crossrefType "journal-article" @default.
- W3135529172 hasAuthorship W3135529172A5001015244 @default.
- W3135529172 hasAuthorship W3135529172A5033817056 @default.
- W3135529172 hasAuthorship W3135529172A5039319849 @default.
- W3135529172 hasAuthorship W3135529172A5044182171 @default.
- W3135529172 hasAuthorship W3135529172A5047585026 @default.
- W3135529172 hasAuthorship W3135529172A5052876062 @default.
- W3135529172 hasAuthorship W3135529172A5057407211 @default.
- W3135529172 hasAuthorship W3135529172A5075740697 @default.
- W3135529172 hasAuthorship W3135529172A5079797770 @default.
- W3135529172 hasAuthorship W3135529172A5082075295 @default.
- W3135529172 hasAuthorship W3135529172A5089206099 @default.
- W3135529172 hasAuthorship W3135529172A5091385056 @default.
- W3135529172 hasBestOaLocation W31355291721 @default.
- W3135529172 hasConcept C100082104 @default.
- W3135529172 hasConcept C121332964 @default.
- W3135529172 hasConcept C159985019 @default.
- W3135529172 hasConcept C171250308 @default.
- W3135529172 hasConcept C185592680 @default.
- W3135529172 hasConcept C19067145 @default.
- W3135529172 hasConcept C191897082 @default.
- W3135529172 hasConcept C192562407 @default.
- W3135529172 hasConcept C22423302 @default.
- W3135529172 hasConcept C26873012 @default.
- W3135529172 hasConcept C2777855556 @default.
- W3135529172 hasConcept C3045981 @default.
- W3135529172 hasConcept C37292000 @default.
- W3135529172 hasConcept C535196362 @default.
- W3135529172 hasConcept C551831248 @default.