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• W3135758830 abstract "This paper presents a passive autofocus algorithm applicable to interferometric microscopes. The proposed algorithm uses the number of slope variations in an image mask to locate the focal plane (based on focus-inflection points) and identify the two neighboring planes at which fringes respectively appear and disappear. In experiments involving a Mirau objective lens, the proposed algorithm matched the autofocusing performance of conventional algorithms, and significantly outperformed detection schemes based on zero-order interference fringe in dealing with all kinds of surface blemish, regardless of severity. In experiments, the proposed algorithm also proved highly effective in cases without fringes." @default.
• W3135758830 created "2021-03-15" @default.
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• W3135758830 date "2021-03-17" @default.
• W3135758830 modified "2023-10-16" @default.
• W3135758830 title "Microscope autofocus algorithm based on number of image slope variations" @default.
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• W3135758830 doi "https://doi.org/10.1364/oe.421926" @default.
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