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- W3135816911 abstract "Diffusion of Be was investigated for the main crystallographic directions in HVPE-GaN: c [0001], m [10-10], and a [11-20]. Be was implanted into the samples at room temperature with a dose of 2.9e15 cm-2 with energy of 200 keV. Ultra-high pressure annealing (UHPA) was performed to repair the post-implantation damage and activate the dopant. The annealing was performed at different time (15 and 30 minutes) and temperature (1200 – 1400°C). Depth profiles of Be were measured by secondary ion mass spectrometry (SIMS). Diffusion coefficients were calculated using the complementary error function (erfc) or Boltzmann-Matano analysis. The determined diffusion coefficients were summarized in an Arrhenius plot: D(1/T). From this relation the pre-exponential factor D0 and the activation energy were calculated. In addition, it was possible to calculate the formation energy for interstitial Be as well as gallium vacancy defects." @default.
- W3135816911 created "2021-03-15" @default.
- W3135816911 creator A5004184180 @default.
- W3135816911 creator A5048282505 @default.
- W3135816911 creator A5055616492 @default.
- W3135816911 creator A5059382318 @default.
- W3135816911 creator A5061783415 @default.
- W3135816911 creator A5065551207 @default.
- W3135816911 creator A5068573576 @default.
- W3135816911 date "2021-03-05" @default.
- W3135816911 modified "2023-10-18" @default.
- W3135816911 title "Investigation of Be diffusion coefficients for various crystallographic directions in GaN grown by HVPE" @default.
- W3135816911 doi "https://doi.org/10.1117/12.2577013" @default.
- W3135816911 hasPublicationYear "2021" @default.
- W3135816911 type Work @default.
- W3135816911 sameAs 3135816911 @default.
- W3135816911 citedByCount "0" @default.
- W3135816911 crossrefType "proceedings-article" @default.
- W3135816911 hasAuthorship W3135816911A5004184180 @default.
- W3135816911 hasAuthorship W3135816911A5048282505 @default.
- W3135816911 hasAuthorship W3135816911A5055616492 @default.
- W3135816911 hasAuthorship W3135816911A5059382318 @default.
- W3135816911 hasAuthorship W3135816911A5061783415 @default.
- W3135816911 hasAuthorship W3135816911A5065551207 @default.
- W3135816911 hasAuthorship W3135816911A5068573576 @default.
- W3135816911 hasConcept C113196181 @default.
- W3135816911 hasConcept C114221277 @default.
- W3135816911 hasConcept C121332964 @default.
- W3135816911 hasConcept C134306372 @default.
- W3135816911 hasConcept C145148216 @default.
- W3135816911 hasConcept C147789679 @default.
- W3135816911 hasConcept C151376022 @default.
- W3135816911 hasConcept C159985019 @default.
- W3135816911 hasConcept C178790620 @default.
- W3135816911 hasConcept C185592680 @default.
- W3135816911 hasConcept C191897082 @default.
- W3135816911 hasConcept C191952053 @default.
- W3135816911 hasConcept C192562407 @default.
- W3135816911 hasConcept C2777855556 @default.
- W3135816911 hasConcept C33923547 @default.
- W3135816911 hasConcept C41823505 @default.
- W3135816911 hasConcept C43617362 @default.
- W3135816911 hasConcept C49040817 @default.
- W3135816911 hasConcept C550372918 @default.
- W3135816911 hasConcept C57863236 @default.
- W3135816911 hasConcept C69357855 @default.
- W3135816911 hasConcept C77671233 @default.
- W3135816911 hasConcept C8010536 @default.
- W3135816911 hasConcept C86183883 @default.
- W3135816911 hasConcept C8739425 @default.
- W3135816911 hasConcept C95121573 @default.
- W3135816911 hasConcept C97355855 @default.
- W3135816911 hasConceptScore W3135816911C113196181 @default.
- W3135816911 hasConceptScore W3135816911C114221277 @default.
- W3135816911 hasConceptScore W3135816911C121332964 @default.
- W3135816911 hasConceptScore W3135816911C134306372 @default.
- W3135816911 hasConceptScore W3135816911C145148216 @default.
- W3135816911 hasConceptScore W3135816911C147789679 @default.
- W3135816911 hasConceptScore W3135816911C151376022 @default.
- W3135816911 hasConceptScore W3135816911C159985019 @default.
- W3135816911 hasConceptScore W3135816911C178790620 @default.
- W3135816911 hasConceptScore W3135816911C185592680 @default.
- W3135816911 hasConceptScore W3135816911C191897082 @default.
- W3135816911 hasConceptScore W3135816911C191952053 @default.
- W3135816911 hasConceptScore W3135816911C192562407 @default.
- W3135816911 hasConceptScore W3135816911C2777855556 @default.
- W3135816911 hasConceptScore W3135816911C33923547 @default.
- W3135816911 hasConceptScore W3135816911C41823505 @default.
- W3135816911 hasConceptScore W3135816911C43617362 @default.
- W3135816911 hasConceptScore W3135816911C49040817 @default.
- W3135816911 hasConceptScore W3135816911C550372918 @default.
- W3135816911 hasConceptScore W3135816911C57863236 @default.
- W3135816911 hasConceptScore W3135816911C69357855 @default.
- W3135816911 hasConceptScore W3135816911C77671233 @default.
- W3135816911 hasConceptScore W3135816911C8010536 @default.
- W3135816911 hasConceptScore W3135816911C86183883 @default.
- W3135816911 hasConceptScore W3135816911C8739425 @default.
- W3135816911 hasConceptScore W3135816911C95121573 @default.
- W3135816911 hasConceptScore W3135816911C97355855 @default.
- W3135816911 hasLocation W31358169111 @default.
- W3135816911 hasOpenAccess W3135816911 @default.
- W3135816911 hasPrimaryLocation W31358169111 @default.
- W3135816911 hasRelatedWork W1964742091 @default.
- W3135816911 hasRelatedWork W1980591497 @default.
- W3135816911 hasRelatedWork W1987774754 @default.
- W3135816911 hasRelatedWork W1989363771 @default.
- W3135816911 hasRelatedWork W2006503297 @default.
- W3135816911 hasRelatedWork W2039701591 @default.
- W3135816911 hasRelatedWork W2042126495 @default.
- W3135816911 hasRelatedWork W3135816911 @default.
- W3135816911 hasRelatedWork W4250955372 @default.
- W3135816911 hasRelatedWork W1775138386 @default.
- W3135816911 isParatext "false" @default.
- W3135816911 isRetracted "false" @default.
- W3135816911 magId "3135816911" @default.
- W3135816911 workType "article" @default.