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- W3136113798 abstract "A method for TiN-coatings deposition by anodic evaporation of titanium in a high-current gas discharge (30 A) with a self–heated hollow cathode in an Ar+N2 medium is proposed. Optical spectral analysis shows that a large amount of activated titanium is present in the gas-discharge plasma, and the proportion of metal ions coming from the plasma to the substrate, taking into account the single-charge ions, reaches 70%. At a nitrogen flow of 5 sccm, TiN-coatings with a thickness of 2 µm and a hardness of up to 24 GPa were obtained. The deposition rate at a distance of 7 cm from the vapor source was ~4 µm/h." @default.
- W3136113798 created "2021-03-29" @default.
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- W3136113798 date "2021-01-01" @default.
- W3136113798 modified "2023-09-26" @default.
- W3136113798 title "Получение TiN-покрытий реактивным анодным испарением титана в разряде с самонакаливаемым полым катодом" @default.
- W3136113798 doi "https://doi.org/10.21883/pjtf.2021.10.50971.18646" @default.
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