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- W3136133989 abstract "Nowadays, 3D geometric dimensional measurements of step height are performed on many types of samples using different instruments, such as AFM, optical microscopy, et.al. For step height measurements generally, the traceability of the z-axis is very importance. In this paper, displacement metrology in the vertical direction or z-axis is first determined, thus having a known and specific relationship between the physical edge on the sample and the location of the detected edge in the image. By consider of the location of the step, a step height is calculated by requirement of fitting to upper and lower surfaces. An algorithm is introduced to fit the upper and lower terraces. Then, we locate the edge and determine the step height by the data extrapolation of those fits. In order to reduce the uncertainty budget for step height measurements, 50nm, 100nm, 200nm, 500nm and 1000nm step height are respectively tested, and dominant sources are also discussed." @default.
- W3136133989 created "2021-03-29" @default.
- W3136133989 creator A5010019931 @default.
- W3136133989 creator A5031755414 @default.
- W3136133989 creator A5050806763 @default.
- W3136133989 creator A5051439395 @default.
- W3136133989 date "2021-03-12" @default.
- W3136133989 modified "2023-09-27" @default.
- W3136133989 title "A 3D geometric dimensional measurement method of step height" @default.
- W3136133989 doi "https://doi.org/10.1117/12.2587611" @default.
- W3136133989 hasPublicationYear "2021" @default.
- W3136133989 type Work @default.
- W3136133989 sameAs 3136133989 @default.
- W3136133989 citedByCount "0" @default.
- W3136133989 crossrefType "proceedings-article" @default.
- W3136133989 hasAuthorship W3136133989A5010019931 @default.
- W3136133989 hasAuthorship W3136133989A5031755414 @default.
- W3136133989 hasAuthorship W3136133989A5050806763 @default.
- W3136133989 hasAuthorship W3136133989A5051439395 @default.
- W3136133989 hasConcept C105795698 @default.
- W3136133989 hasConcept C107551265 @default.
- W3136133989 hasConcept C120665830 @default.
- W3136133989 hasConcept C121332964 @default.
- W3136133989 hasConcept C127313418 @default.
- W3136133989 hasConcept C132459708 @default.
- W3136133989 hasConcept C13280743 @default.
- W3136133989 hasConcept C15744967 @default.
- W3136133989 hasConcept C162307627 @default.
- W3136133989 hasConcept C195766429 @default.
- W3136133989 hasConcept C2524010 @default.
- W3136133989 hasConcept C31972630 @default.
- W3136133989 hasConcept C33923547 @default.
- W3136133989 hasConcept C41008148 @default.
- W3136133989 hasConcept C542102704 @default.
- W3136133989 hasConceptScore W3136133989C105795698 @default.
- W3136133989 hasConceptScore W3136133989C107551265 @default.
- W3136133989 hasConceptScore W3136133989C120665830 @default.
- W3136133989 hasConceptScore W3136133989C121332964 @default.
- W3136133989 hasConceptScore W3136133989C127313418 @default.
- W3136133989 hasConceptScore W3136133989C132459708 @default.
- W3136133989 hasConceptScore W3136133989C13280743 @default.
- W3136133989 hasConceptScore W3136133989C15744967 @default.
- W3136133989 hasConceptScore W3136133989C162307627 @default.
- W3136133989 hasConceptScore W3136133989C195766429 @default.
- W3136133989 hasConceptScore W3136133989C2524010 @default.
- W3136133989 hasConceptScore W3136133989C31972630 @default.
- W3136133989 hasConceptScore W3136133989C33923547 @default.
- W3136133989 hasConceptScore W3136133989C41008148 @default.
- W3136133989 hasConceptScore W3136133989C542102704 @default.
- W3136133989 hasLocation W31361339891 @default.
- W3136133989 hasOpenAccess W3136133989 @default.
- W3136133989 hasPrimaryLocation W31361339891 @default.
- W3136133989 hasRelatedWork W1975125691 @default.
- W3136133989 hasRelatedWork W2049587054 @default.
- W3136133989 hasRelatedWork W2051909373 @default.
- W3136133989 hasRelatedWork W2058581251 @default.
- W3136133989 hasRelatedWork W2105594625 @default.
- W3136133989 hasRelatedWork W2793693916 @default.
- W3136133989 hasRelatedWork W4238119391 @default.
- W3136133989 hasRelatedWork W4294214842 @default.
- W3136133989 hasRelatedWork W73162525 @default.
- W3136133989 hasRelatedWork W2398481906 @default.
- W3136133989 isParatext "false" @default.
- W3136133989 isRetracted "false" @default.
- W3136133989 magId "3136133989" @default.
- W3136133989 workType "article" @default.