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- W3136147566 abstract "A novel on-chip cooling thermal flow sensor is realized: We fabricated an integrated calorimetric and a hot-film thermal flow sensor with a cooling thermal reference using a Peltier module to create a thermal distribution depending on the flow rate. The integrated thermal flow sensors realize high-resolution and wide-range flow-rate measurement in a microfluidic device without heating reagents. Due to the non-heating characteristic, the proposed thermal flow sensor can avoid heat denaturation of biological reagents, such as blood and cell-containing samples, and allows us to use a higher resolution flow sensor in biological analysis." @default.
- W3136147566 created "2021-03-29" @default.
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- W3136147566 date "2021-01-25" @default.
- W3136147566 modified "2023-10-18" @default.
- W3136147566 title "On-Chip Cooling Thermal Flow Sensor for Biological Applications" @default.
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- W3136147566 doi "https://doi.org/10.1109/mems51782.2021.9375433" @default.
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