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• W3136163311 endingPage "245301" @default.
• W3136163311 startingPage "245301" @default.
• W3136163311 abstract "Abstract In this work, high quality AlGaN layers, grown by metal organic chemical vapour deposition, on a commercial c-sapphire substrate, were implanted at a fluence of <?CDATA $1, times ,{10^{14}}{text{ A}}{{text{r}}^ + } cdot {text{c}}{{text{m}}^{ - 2}}$?> <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML overflow=scroll> <mml:mn>1</mml:mn> <mml:mo>×</mml:mo> <mml:mrow> <mml:msup> <mml:mn>10</mml:mn> <mml:mrow> <mml:mn>14</mml:mn> </mml:mrow> </mml:msup> </mml:mrow> <mml:mrow> <mml:mtext> A</mml:mtext> </mml:mrow> <mml:mrow> <mml:msup> <mml:mrow> <mml:mtext>r</mml:mtext> </mml:mrow> <mml:mo>+</mml:mo> </mml:msup> </mml:mrow> <mml:mo>⋅</mml:mo> <mml:mrow> <mml:mtext>c</mml:mtext> </mml:mrow> <mml:mrow> <mml:msup> <mml:mrow> <mml:mtext>m</mml:mtext> </mml:mrow> <mml:mrow> <mml:mo>−</mml:mo> <mml:mn>2</mml:mn> </mml:mrow> </mml:msup> </mml:mrow> </mml:math> . Implantation was performed for energies between 25 and 250 keV to explore the strain field created with increasing penetration of the implanted ions. Perpendicular to the sample surface deformation was determined through simulations of the <?CDATA $2theta - omega $?> <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML overflow=scroll> <mml:mn>2</mml:mn> <mml:mi>θ</mml:mi> <mml:mo>−</mml:mo> <mml:mi>ω</mml:mi> </mml:math> scans of the allowed (0002), (0004) and (0006) AlGaN reflections. According to the simulations, the peak attributed to the implanted region is well defined using a small number of layers with specific thickness, deformation, and static Debye–Waller factors. Although similar ion end of range, calculated via Monte Carlo simulations of ions in matter, of around 240–250 nm for 200 keV implanted normal to the sample surface and 250 keV at 38°, the strain distribution in depth turns out quite different in these samples. According to dynamical theory of x-ray diffraction simulations, the argon ions penetrate deeper on the former, which might be related to channeling effects, while maximum damage is observed in the latter. Damage accumulation is suggested to be a complex mechanism, where damage maximum and damage extension play equivalent important roles." @default.
• W3136163311 created "2021-03-29" @default.
• W3136163311 creator A5004517770 @default.
• W3136163311 creator A5032305648 @default.
• W3136163311 creator A5066677047 @default.
• W3136163311 creator A5078196466 @default.
• W3136163311 creator A5086231829 @default.
• W3136163311 date "2021-03-30" @default.
• W3136163311 modified "2023-10-01" @default.
• W3136163311 title "Simulating the effect of Ar⁺ energy implantation on the strain propagation in AlGaN" @default.
• W3136163311 cites W1518372733 @default.
• W3136163311 cites W1563416415 @default.
• W3136163311 cites W1673437353 @default.
• W3136163311 cites W1675399623 @default.
• W3136163311 cites W1967274321 @default.
• W3136163311 cites W1982381330 @default.
• W3136163311 cites W1982949324 @default.
• W3136163311 cites W1984032387 @default.
• W3136163311 cites W1986715836 @default.
• W3136163311 cites W1989234794 @default.
• W3136163311 cites W1991210042 @default.
• W3136163311 cites W2002822879 @default.
• W3136163311 cites W2009265720 @default.
• W3136163311 cites W2018750909 @default.
• W3136163311 cites W2020143503 @default.
• W3136163311 cites W2023273452 @default.
• W3136163311 cites W2027305584 @default.
• W3136163311 cites W2029984698 @default.
• W3136163311 cites W2031975877 @default.
• W3136163311 cites W2038102069 @default.
• W3136163311 cites W2047165001 @default.
• W3136163311 cites W2049457481 @default.
• W3136163311 cites W2055025469 @default.
• W3136163311 cites W2059120276 @default.
• W3136163311 cites W2066377769 @default.
• W3136163311 cites W2077274768 @default.
• W3136163311 cites W2118867188 @default.
• W3136163311 cites W2129034117 @default.
• W3136163311 cites W2132295068 @default.
• W3136163311 cites W2139585874 @default.
• W3136163311 cites W2141849263 @default.
• W3136163311 cites W2144759212 @default.
• W3136163311 cites W2148945027 @default.
• W3136163311 cites W2166205350 @default.
• W3136163311 cites W2259768559 @default.
• W3136163311 cites W2288845041 @default.
• W3136163311 cites W2296397641 @default.
• W3136163311 cites W2611685586 @default.
• W3136163311 cites W2620600345 @default.
• W3136163311 cites W2791194095 @default.
• W3136163311 cites W2903060893 @default.
• W3136163311 cites W2904566397 @default.
• W3136163311 cites W2917798923 @default.
• W3136163311 cites W2927396488 @default.
• W3136163311 cites W2940468782 @default.
• W3136163311 cites W3028246478 @default.
• W3136163311 cites W4210616045 @default.
• W3136163311 cites W4256134723 @default.
• W3136163311 cites W2084041061 @default.
• W3136163311 doi "https://doi.org/10.1088/1361-6463/abee44" @default.
• W3136163311 hasPublicationYear "2021" @default.
• W3136163311 type Work @default.
• W3136163311 sameAs 3136163311 @default.
• W3136163311 citedByCount "5" @default.
• W3136163311 countsByYear W31361633112022 @default.
• W3136163311 countsByYear W31361633112023 @default.
• W3136163311 crossrefType "journal-article" @default.
• W3136163311 hasAuthorship W3136163311A5004517770 @default.
• W3136163311 hasAuthorship W3136163311A5032305648 @default.
• W3136163311 hasAuthorship W3136163311A5066677047 @default.
• W3136163311 hasAuthorship W3136163311A5078196466 @default.
• W3136163311 hasAuthorship W3136163311A5086231829 @default.
• W3136163311 hasConcept C113196181 @default.
• W3136163311 hasConcept C185592680 @default.
• W3136163311 hasConcept C192562407 @default.
• W3136163311 hasConcept C43617362 @default.
• W3136163311 hasConceptScore W3136163311C113196181 @default.
• W3136163311 hasConceptScore W3136163311C185592680 @default.
• W3136163311 hasConceptScore W3136163311C192562407 @default.
• W3136163311 hasConceptScore W3136163311C43617362 @default.
• W3136163311 hasFunder F4320312331 @default.
• W3136163311 hasFunder F4320334779 @default.
• W3136163311 hasIssue "24" @default.
• W3136163311 hasLocation W31361633111 @default.
• W3136163311 hasOpenAccess W3136163311 @default.
• W3136163311 hasPrimaryLocation W31361633111 @default.
• W3136163311 hasRelatedWork W2018879842 @default.
• W3136163311 hasRelatedWork W2040490366 @default.
• W3136163311 hasRelatedWork W2325423348 @default.
• W3136163311 hasRelatedWork W2737498735 @default.
• W3136163311 hasRelatedWork W2744391499 @default.
• W3136163311 hasRelatedWork W2898370298 @default.
• W3136163311 hasRelatedWork W2899084033 @default.
• W3136163311 hasRelatedWork W3120461830 @default.
• W3136163311 hasRelatedWork W3144504424 @default.
• W3136163311 hasRelatedWork W4292492973 @default.
• W3136163311 hasVolume "54" @default.
• W3136163311 isParatext "false" @default.

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