Matches in SemOpenAlex for { <https://semopenalex.org/work/W3136286185> ?p ?o ?g. }
Showing items 1 to 55 of
55
with 100 items per page.
- W3136286185 abstract "It is quite frequent that a factorial fabrication process includes very complex systems, leading to difficulties in its regulation, estimation and prediction. To overcome these difficulties, causality in the complex systems is a key issue, which has not been frequently stressed but is of importance for effective performance of machine learning. One of the examples with such complexity is plasma and its chemistry, where they are in processes of dry etching and plasma chemical vapor deposition. So far, we successfully visualized the complexities using graphs or networks, where nodes represent elements and edges imply interactions between them. In this study, focusing on silane (SiH 4 ) and methane (CH4) low-temperature molecular plasma chemistry, we clarify roles of species in the chemical reaction network, like reactants, intermediates and products, where a species is a node in this species network and a reactant-product pair is an edge. This distinction is straightforward for selection of reactants as input and products as output variables. We also show and discuss another network, reaction network, in which a reactant-product pair is an edge and its size is so huge that its network statistics is categorized by complex network science. By visualizing and analyzing a complex chemical reaction network in molecular plasma, we obtain useful information for parameter regulation in real processes and also identification of input/output variables for machine learning of a given process." @default.
- W3136286185 created "2021-03-29" @default.
- W3136286185 creator A5009756740 @default.
- W3136286185 creator A5050031371 @default.
- W3136286185 creator A5061627044 @default.
- W3136286185 creator A5090264724 @default.
- W3136286185 date "2020-12-15" @default.
- W3136286185 modified "2023-09-24" @default.
- W3136286185 title "Analysis of Visualized Complex Reaction Network in Low- Temperature Molecular Plasma" @default.
- W3136286185 cites W1837405639 @default.
- W3136286185 cites W2124637492 @default.
- W3136286185 cites W2143117649 @default.
- W3136286185 cites W2484659984 @default.
- W3136286185 cites W2486096428 @default.
- W3136286185 cites W2589469183 @default.
- W3136286185 cites W2773655168 @default.
- W3136286185 cites W2917286209 @default.
- W3136286185 doi "https://doi.org/10.1109/issm51728.2020.9377518" @default.
- W3136286185 hasPublicationYear "2020" @default.
- W3136286185 type Work @default.
- W3136286185 sameAs 3136286185 @default.
- W3136286185 citedByCount "0" @default.
- W3136286185 crossrefType "proceedings-article" @default.
- W3136286185 hasAuthorship W3136286185A5009756740 @default.
- W3136286185 hasAuthorship W3136286185A5050031371 @default.
- W3136286185 hasAuthorship W3136286185A5061627044 @default.
- W3136286185 hasAuthorship W3136286185A5090264724 @default.
- W3136286185 hasConcept C121332964 @default.
- W3136286185 hasConcept C185544564 @default.
- W3136286185 hasConcept C192562407 @default.
- W3136286185 hasConcept C41008148 @default.
- W3136286185 hasConcept C82706917 @default.
- W3136286185 hasConceptScore W3136286185C121332964 @default.
- W3136286185 hasConceptScore W3136286185C185544564 @default.
- W3136286185 hasConceptScore W3136286185C192562407 @default.
- W3136286185 hasConceptScore W3136286185C41008148 @default.
- W3136286185 hasConceptScore W3136286185C82706917 @default.
- W3136286185 hasFunder F4320309652 @default.
- W3136286185 hasLocation W31362861851 @default.
- W3136286185 hasOpenAccess W3136286185 @default.
- W3136286185 hasPrimaryLocation W31362861851 @default.
- W3136286185 hasRelatedWork W2160608618 @default.
- W3136286185 hasRelatedWork W2328380595 @default.
- W3136286185 hasRelatedWork W2748952813 @default.
- W3136286185 hasRelatedWork W2889753853 @default.
- W3136286185 hasRelatedWork W2895773523 @default.
- W3136286185 hasRelatedWork W2899084033 @default.
- W3136286185 hasRelatedWork W2899764894 @default.
- W3136286185 hasRelatedWork W4212879511 @default.
- W3136286185 hasRelatedWork W4224881150 @default.
- W3136286185 hasRelatedWork W4292492973 @default.
- W3136286185 isParatext "false" @default.
- W3136286185 isRetracted "false" @default.
- W3136286185 magId "3136286185" @default.
- W3136286185 workType "article" @default.