Matches in SemOpenAlex for { <https://semopenalex.org/work/W3136392279> ?p ?o ?g. }
Showing items 1 to 82 of
82
with 100 items per page.
- W3136392279 abstract "Robust and light-weighted microstructures are highly desired for various MEMS devices. Thin-film structures are light-weighted, but often suffer from low stiffness. In this abstract, a microstructure with tunable and enhanced stiffness is proposed for the first time. The stiffness-tunable microstructure is based on an electrothermal bimorph beam with an arched transverse cross-section. The concept, exemplified structure design and fabrication method of the proposed structure are presented. Both simulation and test results show that the stiffness of such a structure can be continuously changed more than 25 times by tuning the applied voltage from 0 to 7 V. This method provides a simple approach to stiffen thin-film microstructures." @default.
- W3136392279 created "2021-03-29" @default.
- W3136392279 creator A5023837881 @default.
- W3136392279 creator A5023943255 @default.
- W3136392279 creator A5026793138 @default.
- W3136392279 creator A5049078993 @default.
- W3136392279 creator A5054132481 @default.
- W3136392279 date "2021-01-25" @default.
- W3136392279 modified "2023-10-16" @default.
- W3136392279 title "Stiffness-Tunable Microstructures Based on Electrothermal Bimorph Beams" @default.
- W3136392279 cites W2055103084 @default.
- W3136392279 cites W2105101786 @default.
- W3136392279 cites W2116239903 @default.
- W3136392279 cites W2124770290 @default.
- W3136392279 cites W2137437969 @default.
- W3136392279 cites W2140804926 @default.
- W3136392279 cites W2546400839 @default.
- W3136392279 cites W2611917654 @default.
- W3136392279 doi "https://doi.org/10.1109/mems51782.2021.9375223" @default.
- W3136392279 hasPublicationYear "2021" @default.
- W3136392279 type Work @default.
- W3136392279 sameAs 3136392279 @default.
- W3136392279 citedByCount "0" @default.
- W3136392279 crossrefType "proceedings-article" @default.
- W3136392279 hasAuthorship W3136392279A5023837881 @default.
- W3136392279 hasAuthorship W3136392279A5023943255 @default.
- W3136392279 hasAuthorship W3136392279A5026793138 @default.
- W3136392279 hasAuthorship W3136392279A5049078993 @default.
- W3136392279 hasAuthorship W3136392279A5054132481 @default.
- W3136392279 hasConcept C100082104 @default.
- W3136392279 hasConcept C119599485 @default.
- W3136392279 hasConcept C127413603 @default.
- W3136392279 hasConcept C136525101 @default.
- W3136392279 hasConcept C142724271 @default.
- W3136392279 hasConcept C159985019 @default.
- W3136392279 hasConcept C165801399 @default.
- W3136392279 hasConcept C168834538 @default.
- W3136392279 hasConcept C192562407 @default.
- W3136392279 hasConcept C204787440 @default.
- W3136392279 hasConcept C2778393539 @default.
- W3136392279 hasConcept C2779372316 @default.
- W3136392279 hasConcept C37977207 @default.
- W3136392279 hasConcept C49040817 @default.
- W3136392279 hasConcept C66938386 @default.
- W3136392279 hasConcept C71924100 @default.
- W3136392279 hasConcept C87976508 @default.
- W3136392279 hasConceptScore W3136392279C100082104 @default.
- W3136392279 hasConceptScore W3136392279C119599485 @default.
- W3136392279 hasConceptScore W3136392279C127413603 @default.
- W3136392279 hasConceptScore W3136392279C136525101 @default.
- W3136392279 hasConceptScore W3136392279C142724271 @default.
- W3136392279 hasConceptScore W3136392279C159985019 @default.
- W3136392279 hasConceptScore W3136392279C165801399 @default.
- W3136392279 hasConceptScore W3136392279C168834538 @default.
- W3136392279 hasConceptScore W3136392279C192562407 @default.
- W3136392279 hasConceptScore W3136392279C204787440 @default.
- W3136392279 hasConceptScore W3136392279C2778393539 @default.
- W3136392279 hasConceptScore W3136392279C2779372316 @default.
- W3136392279 hasConceptScore W3136392279C37977207 @default.
- W3136392279 hasConceptScore W3136392279C49040817 @default.
- W3136392279 hasConceptScore W3136392279C66938386 @default.
- W3136392279 hasConceptScore W3136392279C71924100 @default.
- W3136392279 hasConceptScore W3136392279C87976508 @default.
- W3136392279 hasFunder F4320321001 @default.
- W3136392279 hasFunder F4320329860 @default.
- W3136392279 hasLocation W31363922791 @default.
- W3136392279 hasOpenAccess W3136392279 @default.
- W3136392279 hasPrimaryLocation W31363922791 @default.
- W3136392279 hasRelatedWork W2003894099 @default.
- W3136392279 hasRelatedWork W2058945371 @default.
- W3136392279 hasRelatedWork W2077841676 @default.
- W3136392279 hasRelatedWork W2351679394 @default.
- W3136392279 hasRelatedWork W2591056239 @default.
- W3136392279 hasRelatedWork W2946673320 @default.
- W3136392279 hasRelatedWork W2951208012 @default.
- W3136392279 hasRelatedWork W3156047245 @default.
- W3136392279 hasRelatedWork W4240768129 @default.
- W3136392279 hasRelatedWork W4327940569 @default.
- W3136392279 isParatext "false" @default.
- W3136392279 isRetracted "false" @default.
- W3136392279 magId "3136392279" @default.
- W3136392279 workType "article" @default.