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- W3136595551 abstract "A novel frequency modulated MEMS magnetometer is presented. The new device is inspired by the magnetic force microscopy technique, it combines standard MEMS technology with magnetic elements to obtain a magnetometer with potential for low power consumption and high performance. The analytical model and the characterization of the first proof-concept device are presented." @default.
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- W3136595551 date "2021-01-25" @default.
- W3136595551 modified "2023-10-02" @default.
- W3136595551 title "MEMS Magnetometer Using Magnetic Flux Concentrators and Permanent Magnets" @default.
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- W3136595551 doi "https://doi.org/10.1109/mems51782.2021.9375441" @default.
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