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- W3136649199 abstract "Motivated by the huge demands for large scale photonic structures, micro-/nanofabrication technologies, especially laser direct writing (LDW) technologies, have made great progress in the past few years in the aspect of resolution, scalability, and fabrication throughput. This review will provide a comprehensive study on the research progress and latest achievements of LDW. Moreover, the patterning solutions with the feature of high resolution and large area for 2.5D structures, and periodic structures will be discussed, respectively. Finally, an outlook on the possible future directions of LDW methods will be proposed." @default.
- W3136649199 created "2021-03-29" @default.
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- W3136649199 date "2021-01-25" @default.
- W3136649199 modified "2023-09-27" @default.
- W3136649199 title "Nanofabrication Toward High-Resolution and Large Area" @default.
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- W3136649199 doi "https://doi.org/10.1109/mems51782.2021.9375398" @default.
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