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- W3136803312 abstract "This paper focuses on the micromachining technology of langasite microcavity which is mainly composed of wet etching and direct bonding procedures. The cut of the langasite wafer is (0°, 138.5°, 26.6°). The influence of external etching conditions (temperature and volume ratios of the etchant) on the etching rate has been discussed. A microcavity with a clear boundary and smooth surface is obtained, 100 μm in-depth, and 4mm in diameter, with a high etching rate of 42 μm/h. Then, the wafers are activated with the oxygen plasma to obtain high hydrophilic surfaces. They are annealed at 1000 °C 6 MPa with a duration of two hours to complete the direct bonding procedure. The high bonding strength of 3.81 MPa and well-sealing performance have been tested. Our work is of great significance to the fabrication of surface acoustic wave devices in ultra-high temperatures." @default.
- W3136803312 created "2021-03-29" @default.
- W3136803312 creator A5002509281 @default.
- W3136803312 creator A5027319731 @default.
- W3136803312 date "2021-01-25" @default.
- W3136803312 modified "2023-09-26" @default.
- W3136803312 title "Langasite Micromachining Technology Applied to Surface Acoustic Wave Sensors in Ultra-High Temperatures" @default.
- W3136803312 cites W1964138759 @default.
- W3136803312 cites W2044619291 @default.
- W3136803312 cites W2086052182 @default.
- W3136803312 cites W2780717666 @default.
- W3136803312 cites W2885529499 @default.
- W3136803312 cites W2887434297 @default.
- W3136803312 cites W2977559380 @default.
- W3136803312 cites W3034242886 @default.
- W3136803312 doi "https://doi.org/10.1109/mems51782.2021.9375213" @default.
- W3136803312 hasPublicationYear "2021" @default.
- W3136803312 type Work @default.
- W3136803312 sameAs 3136803312 @default.
- W3136803312 citedByCount "1" @default.
- W3136803312 countsByYear W31368033122022 @default.
- W3136803312 crossrefType "proceedings-article" @default.
- W3136803312 hasAuthorship W3136803312A5002509281 @default.
- W3136803312 hasAuthorship W3136803312A5027319731 @default.
- W3136803312 hasConcept C100460472 @default.
- W3136803312 hasConcept C120665830 @default.
- W3136803312 hasConcept C121332964 @default.
- W3136803312 hasConcept C1291036 @default.
- W3136803312 hasConcept C136525101 @default.
- W3136803312 hasConcept C142724271 @default.
- W3136803312 hasConcept C145667562 @default.
- W3136803312 hasConcept C159985019 @default.
- W3136803312 hasConcept C160671074 @default.
- W3136803312 hasConcept C162954803 @default.
- W3136803312 hasConcept C192562407 @default.
- W3136803312 hasConcept C204787440 @default.
- W3136803312 hasConcept C2778071519 @default.
- W3136803312 hasConcept C2779133538 @default.
- W3136803312 hasConcept C2779227376 @default.
- W3136803312 hasConcept C33220542 @default.
- W3136803312 hasConcept C37977207 @default.
- W3136803312 hasConcept C41075158 @default.
- W3136803312 hasConcept C49040817 @default.
- W3136803312 hasConcept C71924100 @default.
- W3136803312 hasConceptScore W3136803312C100460472 @default.
- W3136803312 hasConceptScore W3136803312C120665830 @default.
- W3136803312 hasConceptScore W3136803312C121332964 @default.
- W3136803312 hasConceptScore W3136803312C1291036 @default.
- W3136803312 hasConceptScore W3136803312C136525101 @default.
- W3136803312 hasConceptScore W3136803312C142724271 @default.
- W3136803312 hasConceptScore W3136803312C145667562 @default.
- W3136803312 hasConceptScore W3136803312C159985019 @default.
- W3136803312 hasConceptScore W3136803312C160671074 @default.
- W3136803312 hasConceptScore W3136803312C162954803 @default.
- W3136803312 hasConceptScore W3136803312C192562407 @default.
- W3136803312 hasConceptScore W3136803312C204787440 @default.
- W3136803312 hasConceptScore W3136803312C2778071519 @default.
- W3136803312 hasConceptScore W3136803312C2779133538 @default.
- W3136803312 hasConceptScore W3136803312C2779227376 @default.
- W3136803312 hasConceptScore W3136803312C33220542 @default.
- W3136803312 hasConceptScore W3136803312C37977207 @default.
- W3136803312 hasConceptScore W3136803312C41075158 @default.
- W3136803312 hasConceptScore W3136803312C49040817 @default.
- W3136803312 hasConceptScore W3136803312C71924100 @default.
- W3136803312 hasFunder F4320321001 @default.
- W3136803312 hasLocation W31368033121 @default.
- W3136803312 hasOpenAccess W3136803312 @default.
- W3136803312 hasPrimaryLocation W31368033121 @default.
- W3136803312 hasRelatedWork W139592794 @default.
- W3136803312 hasRelatedWork W1839133467 @default.
- W3136803312 hasRelatedWork W1942645863 @default.
- W3136803312 hasRelatedWork W1955183922 @default.
- W3136803312 hasRelatedWork W1981865689 @default.
- W3136803312 hasRelatedWork W2159636143 @default.
- W3136803312 hasRelatedWork W2370573833 @default.
- W3136803312 hasRelatedWork W3136803312 @default.
- W3136803312 hasRelatedWork W4220712000 @default.
- W3136803312 hasRelatedWork W2186803100 @default.
- W3136803312 isParatext "false" @default.
- W3136803312 isRetracted "false" @default.
- W3136803312 magId "3136803312" @default.
- W3136803312 workType "article" @default.