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- W3137037800 abstract "In this paper, a humidity sensor based on surface acoustic wave (SAW) resonator and Molybdenum disulfide (MoS <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> ) is proposed for high performance. A graphene oxide (GO) film is firstly coated on the resonator as isolated layer, then a MoS <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> film was coated as sensing layer. The proposed humidity sensor has advantages of high sensitivity (12.41 kHz/%RH), low hysteresis (4.32%), high stability (variation≈1%), fast response (0.4 s) and recovery (0.8 s) time. Based on this high-performance sensor, we demonstrate applications of human breath monitoring and noncontact detection of finger motion." @default.
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- W3137037800 date "2021-01-25" @default.
- W3137037800 modified "2023-09-30" @default.
- W3137037800 title "Highly Sensitive and Fast-Response Humidity Sensor Based On Saw Resonator and MoS<sub>2</sub> for Human Activity Detection" @default.
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- W3137037800 doi "https://doi.org/10.1109/mems51782.2021.9375370" @default.
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