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- W3137489966 abstract "We report on phonon diffraction limited performance of GaN/AIN/NbN/SiC epitaxial HBARs (epi-HBARS) that act as Fabry-Perot acoustic cavities with parallel reflectors. In a series of devices with varying transducer diameter (Ø), We find that the smallest epi-HBARS (Ø=22.5 um on a 350 um thick substrate) are indeed limited by diffraction, yet achieve f × Q ≈ 10 <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>12</sup> Hz at 7.2 K. Near the diffraction limit, f × Q ≈10 <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>14</sup> Hz for Ø>50 um, and for larger devices that are not diffraction limited, f × Q ≈ 2×10 <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>16</sup> Hz. We discuss the practical tradeoffs involved in using such high performance electrically transduced epi-HBARs compared to confocal HBARs with an engineered curved surface that are popular for phonon-qubit coupling in quantum acoustodynamic (QAD) systems." @default.
- W3137489966 created "2021-03-29" @default.
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- W3137489966 date "2021-01-25" @default.
- W3137489966 modified "2023-09-27" @default.
- W3137489966 title "Phonon Diffraction Limited Performance of Fabry-Pérot Cavities in Piezoelectric epi – Hbars" @default.
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- W3137489966 doi "https://doi.org/10.1109/mems51782.2021.9375450" @default.
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