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- W3137561632 abstract "This paper demonstrates a high performance tactical-grade monolithic wheeled horizontal dual-axis (pitch and roll) MEMS gyroscope based on off-plane quadrature coupling suppression silicon gratings. By unitizing two individual active restraining control loops that adjust the quadrature amplitude in real-time, the off-plane mechanical couplings of the two sense modes are significantly reduced by 157.8 and 339.6 times. Near-navigation grade performance is achieved for the X-axis gyroscope with angle random walk (ARW) of 0.027 deg/√h and in-run bias instability (BI) of 0.22 deg/h. The ARW and BI of Y-axis gyroscope are measured to be 0.5 deg/√h and 1.4 deg/h. All the performance results are obtained without any temperature compensation, which is considerably competitive compared with previously reported single-chip dual-axis gyroscope in literatures and makes it possible to achieve a high-performance compact size planar inertial measurement units (IMU) instead of conventional orthogonal assembly of three yaw gyroscopes." @default.
- W3137561632 created "2021-03-29" @default.
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- W3137561632 date "2021-01-25" @default.
- W3137561632 modified "2023-09-25" @default.
- W3137561632 title "A Tactical-Grade Monolithic Horizontal Dual-Axis Mems Gyroscope Based on off-Plane Quadrature Coupling Suppression Silicon Gratings" @default.
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- W3137561632 doi "https://doi.org/10.1109/mems51782.2021.9375209" @default.
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