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- W3137887920 abstract "The novel sensor for Real-time in situ process monitoring using Quart Crystal Microbalance has been developed to wafer process and deployed in Wafer process. In this document, the deployment result is reviewed and the possibility for the future use is discussed." @default.
- W3137887920 created "2021-03-29" @default.
- W3137887920 creator A5008469126 @default.
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- W3137887920 date "2020-12-15" @default.
- W3137887920 modified "2023-09-27" @default.
- W3137887920 title "Using Quartz Crystal Microbalance to Provide Real-Time Process Monitoring" @default.
- W3137887920 doi "https://doi.org/10.1109/issm51728.2020.9377515" @default.
- W3137887920 hasPublicationYear "2020" @default.
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