FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W3138360386> ?p ?o ?g. }

• W3138360386 endingPage "893" @default.
• W3138360386 startingPage "878" @default.
• W3138360386 abstract "Abstract In this article, we investigate the occurrence of defects in integrated circuit fabrication and show how spatial analysis can be effective in grasping and representing spatial regularities in defect patterns on the silicon supports, called wafers, used to produce microchips. Defects occurring on the wafer surface are the main cause of yield loss in the semiconductor industry; hence, to promptly detect an excess of defects and identify their spatial structure is crucial to the entire fabrication process. To address this hard‐to‐solve problem, this article proposes a concatenation of different methods, namely, a control chart, a clustering algorithm, and a graphical tool. First, a control chart based on the p ‐value of an appropriate test recognizes spatially structured defects on the wafer area. Then a clustering procedure grounded on the minimum spanning tree algorithm is adopted to identify those regions more prone to defect occurrences. Finally, alpha‐shapes are employed to display their shape effectively. The suggested procedure proves to be extremely fast and effective, allowing its implementation in‐line during the fabrication process. This provides a great advantage in modern microelectronics where items tend to be highly specialized and often produced in small lots. In particular, due to the Monte Carlo nature of the procedure, the control chart proposed hereafter does not require gold standard data to be set. This is particularly advantageous for small lot production, which is typically limited in time and does not permit to collect long time series of the charting statistics." @default.
• W3138360386 created "2021-03-29" @default.
• W3138360386 creator A5012376830 @default.
• W3138360386 creator A5033640396 @default.
• W3138360386 creator A5077330030 @default.
• W3138360386 date "2021-03-23" @default.
• W3138360386 modified "2023-10-16" @default.
• W3138360386 title "Identification of spatial defects in semiconductor manufacturing" @default.
• W3138360386 cites W108464071 @default.
• W3138360386 cites W1537035723 @default.
• W3138360386 cites W1972969203 @default.
• W3138360386 cites W1979091955 @default.
• W3138360386 cites W1997049128 @default.
• W3138360386 cites W1998602510 @default.
• W3138360386 cites W2002430127 @default.
• W3138360386 cites W2009296640 @default.
• W3138360386 cites W2023519165 @default.
• W3138360386 cites W2025298711 @default.
• W3138360386 cites W2028895542 @default.
• W3138360386 cites W2035969035 @default.
• W3138360386 cites W2038082933 @default.
• W3138360386 cites W2076778064 @default.
• W3138360386 cites W2079102632 @default.
• W3138360386 cites W2081274614 @default.
• W3138360386 cites W2104441235 @default.
• W3138360386 cites W2112222533 @default.
• W3138360386 cites W2120196566 @default.
• W3138360386 cites W2129657231 @default.
• W3138360386 cites W2151631165 @default.
• W3138360386 cites W2157655126 @default.
• W3138360386 cites W2483664965 @default.
• W3138360386 cites W2484039423 @default.
• W3138360386 cites W2487554612 @default.
• W3138360386 cites W2490191279 @default.
• W3138360386 cites W2496675188 @default.
• W3138360386 cites W2736425480 @default.
• W3138360386 cites W2791782900 @default.
• W3138360386 cites W2804546635 @default.
• W3138360386 cites W2945987769 @default.
• W3138360386 cites W2972727311 @default.
• W3138360386 cites W2997307883 @default.
• W3138360386 cites W3005244013 @default.
• W3138360386 cites W3006152022 @default.
• W3138360386 cites W4231856837 @default.
• W3138360386 cites W4250310729 @default.
• W3138360386 cites W4251002338 @default.
• W3138360386 doi "https://doi.org/10.1002/asmb.2615" @default.
• W3138360386 hasPublicationYear "2021" @default.
• W3138360386 type Work @default.
• W3138360386 sameAs 3138360386 @default.
• W3138360386 citedByCount "0" @default.
• W3138360386 crossrefType "journal-article" @default.
• W3138360386 hasAuthorship W3138360386A5012376830 @default.
• W3138360386 hasAuthorship W3138360386A5033640396 @default.
• W3138360386 hasAuthorship W3138360386A5077330030 @default.
• W3138360386 hasConcept C105795698 @default.
• W3138360386 hasConcept C111919701 @default.
• W3138360386 hasConcept C113644684 @default.
• W3138360386 hasConcept C11413529 @default.
• W3138360386 hasConcept C114614502 @default.
• W3138360386 hasConcept C116834253 @default.
• W3138360386 hasConcept C124101348 @default.
• W3138360386 hasConcept C154945302 @default.
• W3138360386 hasConcept C160671074 @default.
• W3138360386 hasConcept C171250308 @default.
• W3138360386 hasConcept C177264268 @default.
• W3138360386 hasConcept C187937830 @default.
• W3138360386 hasConcept C190812933 @default.
• W3138360386 hasConcept C192562407 @default.
• W3138360386 hasConcept C19499675 @default.
• W3138360386 hasConcept C196985124 @default.
• W3138360386 hasConcept C199360897 @default.
• W3138360386 hasConcept C33923547 @default.
• W3138360386 hasConcept C35750839 @default.
• W3138360386 hasConcept C41008148 @default.
• W3138360386 hasConcept C59822182 @default.
• W3138360386 hasConcept C66018809 @default.
• W3138360386 hasConcept C73555534 @default.
• W3138360386 hasConcept C86803240 @default.
• W3138360386 hasConcept C87619178 @default.
• W3138360386 hasConcept C98045186 @default.
• W3138360386 hasConceptScore W3138360386C105795698 @default.
• W3138360386 hasConceptScore W3138360386C111919701 @default.
• W3138360386 hasConceptScore W3138360386C113644684 @default.
• W3138360386 hasConceptScore W3138360386C11413529 @default.
• W3138360386 hasConceptScore W3138360386C114614502 @default.
• W3138360386 hasConceptScore W3138360386C116834253 @default.
• W3138360386 hasConceptScore W3138360386C124101348 @default.
• W3138360386 hasConceptScore W3138360386C154945302 @default.
• W3138360386 hasConceptScore W3138360386C160671074 @default.
• W3138360386 hasConceptScore W3138360386C171250308 @default.
• W3138360386 hasConceptScore W3138360386C177264268 @default.
• W3138360386 hasConceptScore W3138360386C187937830 @default.
• W3138360386 hasConceptScore W3138360386C190812933 @default.
• W3138360386 hasConceptScore W3138360386C192562407 @default.
• W3138360386 hasConceptScore W3138360386C19499675 @default.
• W3138360386 hasConceptScore W3138360386C196985124 @default.
• W3138360386 hasConceptScore W3138360386C199360897 @default.

• next