Matches in SemOpenAlex for { <https://semopenalex.org/work/W3139097846> ?p ?o ?g. }
- W3139097846 abstract "In this study, plasma-enhanced atomic layer deposited indium oxide (InOx) films were analyzed using a new [dimethylbutylamino]trimethylindium (DATI) liquid precursor and Ar/O2 plasma. The growth property using the DATI precursor, such as growth per cycle, is relatively higher (≥1.0 Å/cycle) than other precursors even in low deposition temperatures (100–250 °C). In addition, impurities (C and N) in the thin films were below the XPS detection limit. Because the number of oxygen vacancies that generate carriers in the InOx thin films increased with the deposition temperature, the carrier concentration (2.7 × 1018–1.4 × 1019 cm−3) and Hall mobility (0.3–1.1 cm2/V s) of the InOx thin film were increased. InOx channel based staggered bottom gate structure thin film transistors (TFTs) were fabricated, and their switching performance were studied. Because the InOx films were deposited with high purity, the electrical properties of TFTs show superior switching performance in terms of saturation mobility (17.5 cm2/V s) and Ion/Ioff ratio (2.9 × 109). Consequently, InOx films deposited with DATI have the potential to be widely used in indium oxide semiconductors, especially backplane TFTs." @default.
- W3139097846 created "2021-03-29" @default.
- W3139097846 creator A5003964842 @default.
- W3139097846 creator A5010502759 @default.
- W3139097846 creator A5012490347 @default.
- W3139097846 creator A5030572646 @default.
- W3139097846 creator A5035603487 @default.
- W3139097846 creator A5046420181 @default.
- W3139097846 creator A5061916152 @default.
- W3139097846 creator A5071947816 @default.
- W3139097846 creator A5091185670 @default.
- W3139097846 date "2021-03-17" @default.
- W3139097846 modified "2023-10-16" @default.
- W3139097846 title "Plasma-enhanced atomic layer deposited indium oxide film using a novel dimethylbutylamino-trimethylindium precursor for thin film transistors" @default.
- W3139097846 cites W1656395402 @default.
- W3139097846 cites W1970221477 @default.
- W3139097846 cites W1974087778 @default.
- W3139097846 cites W1999589524 @default.
- W3139097846 cites W2010540469 @default.
- W3139097846 cites W2025399716 @default.
- W3139097846 cites W2040875144 @default.
- W3139097846 cites W2042215800 @default.
- W3139097846 cites W2058892068 @default.
- W3139097846 cites W2060244975 @default.
- W3139097846 cites W2064938713 @default.
- W3139097846 cites W2069321041 @default.
- W3139097846 cites W2078008448 @default.
- W3139097846 cites W2078207953 @default.
- W3139097846 cites W2082633885 @default.
- W3139097846 cites W2084164769 @default.
- W3139097846 cites W2093215950 @default.
- W3139097846 cites W2112588667 @default.
- W3139097846 cites W2117617871 @default.
- W3139097846 cites W2131716975 @default.
- W3139097846 cites W213766807 @default.
- W3139097846 cites W2149248689 @default.
- W3139097846 cites W2171121039 @default.
- W3139097846 cites W2281514995 @default.
- W3139097846 cites W2321818646 @default.
- W3139097846 cites W2323561876 @default.
- W3139097846 cites W2417111576 @default.
- W3139097846 cites W2466221081 @default.
- W3139097846 cites W2545354885 @default.
- W3139097846 cites W2804176231 @default.
- W3139097846 cites W2806692494 @default.
- W3139097846 cites W2894294560 @default.
- W3139097846 cites W2899233764 @default.
- W3139097846 cites W2910705519 @default.
- W3139097846 cites W2920870918 @default.
- W3139097846 cites W2937612252 @default.
- W3139097846 cites W2978176079 @default.
- W3139097846 cites W2979170330 @default.
- W3139097846 cites W2997780138 @default.
- W3139097846 cites W3103450170 @default.
- W3139097846 cites W976641046 @default.
- W3139097846 doi "https://doi.org/10.1116/6.0000842" @default.
- W3139097846 hasPublicationYear "2021" @default.
- W3139097846 type Work @default.
- W3139097846 sameAs 3139097846 @default.
- W3139097846 citedByCount "7" @default.
- W3139097846 countsByYear W31390978462022 @default.
- W3139097846 countsByYear W31390978462023 @default.
- W3139097846 crossrefType "journal-article" @default.
- W3139097846 hasAuthorship W3139097846A5003964842 @default.
- W3139097846 hasAuthorship W3139097846A5010502759 @default.
- W3139097846 hasAuthorship W3139097846A5012490347 @default.
- W3139097846 hasAuthorship W3139097846A5030572646 @default.
- W3139097846 hasAuthorship W3139097846A5035603487 @default.
- W3139097846 hasAuthorship W3139097846A5046420181 @default.
- W3139097846 hasAuthorship W3139097846A5061916152 @default.
- W3139097846 hasAuthorship W3139097846A5071947816 @default.
- W3139097846 hasAuthorship W3139097846A5091185670 @default.
- W3139097846 hasConcept C110738630 @default.
- W3139097846 hasConcept C113196181 @default.
- W3139097846 hasConcept C127413603 @default.
- W3139097846 hasConcept C171250308 @default.
- W3139097846 hasConcept C175665537 @default.
- W3139097846 hasConcept C175708663 @default.
- W3139097846 hasConcept C185592680 @default.
- W3139097846 hasConcept C19067145 @default.
- W3139097846 hasConcept C192562407 @default.
- W3139097846 hasConcept C2775895354 @default.
- W3139097846 hasConcept C2779227376 @default.
- W3139097846 hasConcept C42360764 @default.
- W3139097846 hasConcept C43617362 @default.
- W3139097846 hasConcept C49040817 @default.
- W3139097846 hasConcept C543292547 @default.
- W3139097846 hasConcept C69544855 @default.
- W3139097846 hasConcept C87359718 @default.
- W3139097846 hasConceptScore W3139097846C110738630 @default.
- W3139097846 hasConceptScore W3139097846C113196181 @default.
- W3139097846 hasConceptScore W3139097846C127413603 @default.
- W3139097846 hasConceptScore W3139097846C171250308 @default.
- W3139097846 hasConceptScore W3139097846C175665537 @default.
- W3139097846 hasConceptScore W3139097846C175708663 @default.
- W3139097846 hasConceptScore W3139097846C185592680 @default.
- W3139097846 hasConceptScore W3139097846C19067145 @default.
- W3139097846 hasConceptScore W3139097846C192562407 @default.
- W3139097846 hasConceptScore W3139097846C2775895354 @default.
- W3139097846 hasConceptScore W3139097846C2779227376 @default.