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- W3140310276 abstract "The variants of application of the method of abrasive jet processing in the electronics industry are analyzed. The features of technology and equipment for dividing silicon wafers into circular disk crystals are highlighted. A comparative analysis of the results of jet-abrasive processing and cutting of silicon wafers with a laser disk is carried out." @default.
- W3140310276 created "2021-04-13" @default.
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- W3140310276 date "2021-01-01" @default.
- W3140310276 modified "2023-10-05" @default.
- W3140310276 title "Silicon wafers separation to disk-crystals by jet-abrasive processing" @default.
- W3140310276 doi "https://doi.org/10.36652/1813-1336-2021-17-3-99-103" @default.
- W3140310276 hasPublicationYear "2021" @default.
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