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- W3140370658 abstract "Experiment of the molecular deposition (MD) films with and without alkyl terminal de- posited on the silicon wafer were conducted by using nanoindentation. It was found that MD films and alkyl terminated MD films exhibit higher critical load (scratch resistance or adhesive strength) and lower coefficient of friction compared with the silicon substrate. Critical load (scratch resis- tance) increases with the number of layers, and coefficients of friction of those MD film with alkyl terminal are still best for the same layer of MD film." @default.
- W3140370658 created "2021-04-13" @default.
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- W3140370658 date "2001-01-01" @default.
- W3140370658 modified "2023-09-24" @default.
- W3140370658 title "Nano-scratch study of molecular deposition (MD) films on silicon wafer using nanoindentation~1" @default.
- W3140370658 hasPublicationYear "2001" @default.
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