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- W3140765184 abstract "This paper reports a comparison between the two kinds of damage behavior in silicon implanted with P_2~+ molecular ions and P~+ atomic ions. The dependence of damage enhancement effect of P_2~+ implanted silicon on ion doses, energies and target temperatures, and their annealing behavior in subsequent thermal anneal process are investigated systematically. A multiple collision model has been developed to elucidate the mechanism of the damage enhancement effect." @default.
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- W3140765184 date "1993-01-01" @default.
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- W3140765184 title "Damage Enhancement Effect in Silicon Implanted With Molecular Ions" @default.
- W3140765184 hasPublicationYear "1993" @default.
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