Matches in SemOpenAlex for { <https://semopenalex.org/work/W314091188> ?p ?o ?g. }
Showing items 1 to 55 of
55
with 100 items per page.
- W314091188 abstract "The incorporation of extremely compact multifunctional microsystems is a highly profitable long-term approach in spacecraft design. These systems bring substantial launch-cost reductions, and enable exciting space exploration and science missions.Silicon microsystems technology is an adequate choice for the multifunctional microsystem development. However, the development of basic microsystems technology cannot be financed within application-specific space missions. Rather, the microsystems technology should be matured through fundamental research.Silicon microsystems technology was used to develop a cold gas microthruster system suitable for minute movements of spacecraft (low Δv). In a hybrid integration, the system unit contains three silicon microsystem parts with four individual thrusters in total, together with external control electronics. The total mass is 0.35 kg.Further integration will result in a mass of 0.08 kg. Complete system integration means that all package and interconnection levels are integrated into the silicon microsystem units. Several vital issues must be addressed, e.g. the reliable bonding of silicon wafers, the microfabrication process compatibility, and the manufacture process sequence. A graphical tool is introduced for process sequence evaluation.Wafer bonding is used as fabrication process, assembly tool, and packaging technique. The quality and reliability of the bonded interfaces must be assessed in order to secure the operation of the microsystems in space. Therefore, statistical methods for burst test evaluation have been developed.Weibull fracture probability functions have been derived in order to interpret the bond quality. In addition, rank-sum tests on spot series and analysis of variance are performed for bond quality diagnostics. The dependence on annealing temperature and surface-activation are presented, together with diagnosed degradation of insufficiently annealed bonds due to different spaceflight environments (thermal cycling, vibration, γ-irradiation)." @default.
- W314091188 created "2016-06-24" @default.
- W314091188 creator A5018206886 @default.
- W314091188 date "2001-12-01" @default.
- W314091188 modified "2023-09-27" @default.
- W314091188 title "Bringing Silicon Microsystems to Space: Manufacture, Performance and Reliability" @default.
- W314091188 hasPublicationYear "2001" @default.
- W314091188 type Work @default.
- W314091188 sameAs 314091188 @default.
- W314091188 citedByCount "0" @default.
- W314091188 crossrefType "book" @default.
- W314091188 hasAuthorship W314091188A5018206886 @default.
- W314091188 hasConcept C127413603 @default.
- W314091188 hasConcept C146978453 @default.
- W314091188 hasConcept C151054161 @default.
- W314091188 hasConcept C171250308 @default.
- W314091188 hasConcept C192562407 @default.
- W314091188 hasConcept C201995342 @default.
- W314091188 hasConcept C29829512 @default.
- W314091188 hasConcept C41008148 @default.
- W314091188 hasConceptScore W314091188C127413603 @default.
- W314091188 hasConceptScore W314091188C146978453 @default.
- W314091188 hasConceptScore W314091188C151054161 @default.
- W314091188 hasConceptScore W314091188C171250308 @default.
- W314091188 hasConceptScore W314091188C192562407 @default.
- W314091188 hasConceptScore W314091188C201995342 @default.
- W314091188 hasConceptScore W314091188C29829512 @default.
- W314091188 hasConceptScore W314091188C41008148 @default.
- W314091188 hasLocation W3140911881 @default.
- W314091188 hasOpenAccess W314091188 @default.
- W314091188 hasPrimaryLocation W3140911881 @default.
- W314091188 hasRelatedWork W1972093921 @default.
- W314091188 hasRelatedWork W1975497126 @default.
- W314091188 hasRelatedWork W2019626667 @default.
- W314091188 hasRelatedWork W2026405942 @default.
- W314091188 hasRelatedWork W2032822601 @default.
- W314091188 hasRelatedWork W2034789965 @default.
- W314091188 hasRelatedWork W2035339205 @default.
- W314091188 hasRelatedWork W2042343557 @default.
- W314091188 hasRelatedWork W2074805233 @default.
- W314091188 hasRelatedWork W2079309643 @default.
- W314091188 hasRelatedWork W2133056054 @default.
- W314091188 hasRelatedWork W2138415439 @default.
- W314091188 hasRelatedWork W2147819834 @default.
- W314091188 hasRelatedWork W2271505462 @default.
- W314091188 hasRelatedWork W2518121526 @default.
- W314091188 hasRelatedWork W2545412824 @default.
- W314091188 hasRelatedWork W611502777 @default.
- W314091188 hasRelatedWork W2098295163 @default.
- W314091188 hasRelatedWork W230468632 @default.
- W314091188 hasRelatedWork W2338078816 @default.
- W314091188 isParatext "false" @default.
- W314091188 isRetracted "false" @default.
- W314091188 magId "314091188" @default.
- W314091188 workType "book" @default.