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• W3140983092 abstract "Reaction rates, particle densities, and temperature distribution in pyrolytic (photothermal) laser-induced microchemical processing are investigated with respect to temperature and concentration-dependent transport coefficients, and with respect to the effect of thermal diffusion. While the model employed is particularly suitable for laserinduced chemical vapor deposition (LCVD), it can also be applied to many cases of laserinduced surface modification and dry-etching. PACS: 42.5, 68, 82.65 The reaction rates achieved in laser chemical processing (LCP) are of great relevance to both the applications of the technique and the elucidation of the fundamental microscopic mechanisms involved [1 ]. In the latter connection the analysis of experimental data on the basis of model calculations has been found extremely useful [2]. In pyrolytic (photothermal) LCP the analysis of reaction rates requires a knowledge of both the laser-induced temperature rise on the substrate to be processed, and of the transport phenomena within the ambient medium. While direct measurements of the local laser-induced temperature rise have actually been demonstrated in a few exceptional cases, the information on the material transport is almost exclusively based on model calculations. In this paper we report on theoretical investigations on transport phenomena in pyrolytic laserinduced chemical processing. In contrast to earlier investigations [2], the present calculations take into account temperature and concentration-dependences of the transport coefficients, and also consider the effect of thermal diffusion. While the model employed is particularly appropriate to pyrolytic laser-induced chemical vapor deposition (LCVD), it can be applied to many cases of pyrolytic laser-induced surface modification (surface oxidation, reduction, doping, etc.) and etching. Furthermore, some of the equations are * On leave from: General Physics Institute, Academy of Sciences, SU-117942 Moscow, USSR formulated in such a general way that they can be adapted to certain cases of pyrolytic LCP from liquidlike phases. The paper is organized as follows: The model and the various different assumptions employed in the calculations are presented in Sect. 1. In Sect. 2 the kinetics of pyrolytic LCP is investigated with respect to the temperature dependences in the particle density, the molecular diffusion coefficient, and the thermal conductivity. The effect of the concentration dependence of the thermal conductivity is studied in Sect. 3. In Sect. 4 the influence of thermal diffusion on the reaction rate is investigated. The most important results are summarized in Sect. 5." @default.
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• W3140983092 date "2004-01-01" @default.
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• W3140983092 title "On the Reaction Kinetics in Laser-Induced Pyrolytic Chemical Processing" @default.
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