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- W3141574152 abstract "基于 Hartmann 棚屋传感器技术，测量系统的一个联机薄电影压力被介绍测量 TiO2 的电影压力， SiO2，和比较在常规进程分别地准备的电影压力之间被做，离子横梁帮助了免职。这部电影上的帮助免职 TiO2 和 SiO2 强调的离子横梁的效果用联机调整在细节，和压力控制方法论被调查，电影做被提出。TiO2 的电影压力价值由离子横梁准备了的结果表演帮助了免职比那低的 40 MPa 被 TiO2 电影变化的常规过程，和压力与增加离子精力从张力的应力逐渐地准备进压缩应力；当 SiO2 的电影压力是时，因为劈啪作响的离子横梁，在离子横梁下面的一个张力的压力帮助了免职效果，和这部电影有增加离子精力的折射索引减少。动态电影压力控制能被完成通过在原处，处理参数的调整能有效地通过电影做基于测量技术，和电影的内在的压力的联机电影压力被改变。" @default.
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- W3141574152 date "2012-01-01" @default.
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- W3141574152 title "Effect of ion-beam assisted deposition on the film stresses of TiO2 and SiO2 and stress control" @default.
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