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- W3141894538 abstract "High resistance thin film chip resistors(0603 type) were studied,and the specifications are as follows:1 k? with tolerance about ±0.1% after laser trimming and temperature coefficient of resistance(TCR) less than ±15×10-6/℃.Cr-Si-Ta-Al films were prepared with Ar flow rate and sputtering power fixed at 20 standard-state cubic centimeter per minute(sccm) and 100 W,respectively.The experiment shows that the electrical properties of Cr-SiTa-Al deposition films can meet the specification requirements of 0603 ty..." @default.
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- W3141894538 date "2010-01-01" @default.
- W3141894538 modified "2023-09-23" @default.
- W3141894538 title "Thin Film Chip Resistors with High Resistance and Low Temperature Coefficient of Resistance" @default.
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