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- W3141949690 abstract "Very small electromechanical coupling coefficient in micro-electromechanical systems (MEMS) or acoustic resonators is quite a concern for oscillator performance, specially at mmWave frequencies. This small coefficient is the manifestation of the small ratio of motional capacitance to static capacitance in the resonators. This work provides a general solution to overcome the problem of relatively high static capacitance at mmWave frequencies and presents analysis and design techniques for achieving extremely low phase noise and a very high figure-of-merit (FoM) in an on-chip MEMS resonator based mmWave oscillator. The proposed analysis and techniques are validated with design and simulation of a 30 GHz oscillator with MEMS resonator having quality factor of 10,000 in 14 nm GF technology. Post layout simulation results show that it achieves a phase noise of −132 dBc/Hz and FoM of 217 dBc/Hz at offset of 1 MHz." @default.
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- W3141949690 date "2021-04-01" @default.
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- W3141949690 title "Analysis and Design Considerations for Achieving the Fundamental Limits of Phase Noise in mmWave Oscillators With On-Chip MEMS Resonator" @default.
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- W3141949690 doi "https://doi.org/10.1109/tcsii.2020.3030074" @default.
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