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• W3141978030 endingPage "149656" @default.
• W3141978030 startingPage "149656" @default.
• W3141978030 abstract "The low-temperature (≤400 oC) deposition of polycrystalline AlN films on silicon is demonstrated by atomic layer annealing (ALA) using either trimethyl aluminum (TMA) and anhydrous hydrazine (N2H4) or tris(dimethylamido) aluminum (TDMAA) and anhydrous N2H4 with an argon plasma treatment utilizing a DC bias to tune the ion energy. Using TDMAA and N2H4, high-quality AlN films are deposited with large grain size and low oxygen/carbon contamination which can be used as a templating layer for further high-speed AlN film growth via sputtering. The deposition of high-quality AlN films deposited by ALA are successfully used as templates for sputtered AlN resulting in a >2x improvement in average grain size when compared to an analogous amorphous template layer." @default.
• W3141978030 created "2021-04-13" @default.
• W3141978030 creator A5003608888 @default.
• W3141978030 creator A5030798526 @default.
• W3141978030 creator A5034521455 @default.
• W3141978030 creator A5039174723 @default.
• W3141978030 creator A5041857898 @default.
• W3141978030 creator A5047432458 @default.
• W3141978030 creator A5063781313 @default.
• W3141978030 creator A5084694126 @default.
• W3141978030 date "2021-07-01" @default.
• W3141978030 modified "2023-09-24" @default.
• W3141978030 title "Tris(dimethylamido)aluminum(III) and N2H4: Ideal precursors for the low-temperature deposition of large grain, oriented c-axis AlN on Si via atomic layer annealing" @default.
• W3141978030 cites W1829312701 @default.
• W3141978030 cites W1972589749 @default.
• W3141978030 cites W1973685743 @default.
• W3141978030 cites W1976758220 @default.
• W3141978030 cites W1981548523 @default.
• W3141978030 cites W1985826406 @default.
• W3141978030 cites W1987462145 @default.
• W3141978030 cites W1991634094 @default.
• W3141978030 cites W1998072350 @default.
• W3141978030 cites W2017426582 @default.
• W3141978030 cites W2018371027 @default.
• W3141978030 cites W2023388231 @default.
• W3141978030 cites W2031779633 @default.
• W3141978030 cites W2041538351 @default.
• W3141978030 cites W2042993801 @default.
• W3141978030 cites W2043289735 @default.
• W3141978030 cites W2071942011 @default.
• W3141978030 cites W2078593584 @default.
• W3141978030 cites W2092746093 @default.
• W3141978030 cites W2111179637 @default.
• W3141978030 cites W2161929596 @default.
• W3141978030 cites W2164688788 @default.
• W3141978030 cites W2531683414 @default.
• W3141978030 cites W2567069678 @default.
• W3141978030 cites W2790150426 @default.
• W3141978030 cites W2801830602 @default.
• W3141978030 cites W2885602979 @default.
• W3141978030 cites W2899293507 @default.
• W3141978030 cites W2940117090 @default.
• W3141978030 cites W3033354096 @default.
• W3141978030 cites W3101090815 @default.
• W3141978030 doi "https://doi.org/10.1016/j.apsusc.2021.149656" @default.
• W3141978030 hasPublicationYear "2021" @default.
• W3141978030 type Work @default.
• W3141978030 sameAs 3141978030 @default.
• W3141978030 citedByCount "7" @default.
• W3141978030 countsByYear W31419780302022 @default.
• W3141978030 countsByYear W31419780302023 @default.
• W3141978030 crossrefType "journal-article" @default.
• W3141978030 hasAuthorship W3141978030A5003608888 @default.
• W3141978030 hasAuthorship W3141978030A5030798526 @default.
• W3141978030 hasAuthorship W3141978030A5034521455 @default.
• W3141978030 hasAuthorship W3141978030A5039174723 @default.
• W3141978030 hasAuthorship W3141978030A5041857898 @default.
• W3141978030 hasAuthorship W3141978030A5047432458 @default.
• W3141978030 hasAuthorship W3141978030A5063781313 @default.
• W3141978030 hasAuthorship W3141978030A5084694126 @default.
• W3141978030 hasConcept C113196181 @default.
• W3141978030 hasConcept C127413603 @default.
• W3141978030 hasConcept C137637335 @default.
• W3141978030 hasConcept C171250308 @default.
• W3141978030 hasConcept C178790620 @default.
• W3141978030 hasConcept C179104552 @default.
• W3141978030 hasConcept C185592680 @default.
• W3141978030 hasConcept C187714232 @default.
• W3141978030 hasConcept C19067145 @default.
• W3141978030 hasConcept C191897082 @default.
• W3141978030 hasConcept C192562407 @default.
• W3141978030 hasConcept C22423302 @default.
• W3141978030 hasConcept C2777855556 @default.
• W3141978030 hasConcept C2779227376 @default.
• W3141978030 hasConcept C42360764 @default.
• W3141978030 hasConcept C513153333 @default.
• W3141978030 hasConcept C547737533 @default.
• W3141978030 hasConcept C56052488 @default.
• W3141978030 hasConcept C57410435 @default.
• W3141978030 hasConcept C69544855 @default.
• W3141978030 hasConcept C8010536 @default.
• W3141978030 hasConceptScore W3141978030C113196181 @default.
• W3141978030 hasConceptScore W3141978030C127413603 @default.
• W3141978030 hasConceptScore W3141978030C137637335 @default.
• W3141978030 hasConceptScore W3141978030C171250308 @default.
• W3141978030 hasConceptScore W3141978030C178790620 @default.
• W3141978030 hasConceptScore W3141978030C179104552 @default.
• W3141978030 hasConceptScore W3141978030C185592680 @default.
• W3141978030 hasConceptScore W3141978030C187714232 @default.
• W3141978030 hasConceptScore W3141978030C19067145 @default.
• W3141978030 hasConceptScore W3141978030C191897082 @default.
• W3141978030 hasConceptScore W3141978030C192562407 @default.
• W3141978030 hasConceptScore W3141978030C22423302 @default.
• W3141978030 hasConceptScore W3141978030C2777855556 @default.
• W3141978030 hasConceptScore W3141978030C2779227376 @default.
• W3141978030 hasConceptScore W3141978030C42360764 @default.
• W3141978030 hasConceptScore W3141978030C513153333 @default.
• W3141978030 hasConceptScore W3141978030C547737533 @default.

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