FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W3143665566> ?p ?o ?g. }

• W3143665566 abstract "Low-k1 lithography results in features that suffer from poor lithographic yield in the presence of process variation. The problem is especially pronounced for lower level metals used for local routing, where bi-directionality gives rise to lithography unfriendly layout patterns. However, one can modify such wires without significantly affecting design behavior. In this paper, we propose to simultaneously modify mask and target during OPC to improve lithographic yield. The method uses image slope information, available during image simulation at no extra cost, as a measure of process window. We derive a cost function that maximizes both contour fidelity and robustness to drive our simultaneous mask and target optimization (SMATO) method. We then develop analytical equations to predict the cost for a given mask and target modification and use a fast algorithm to minimize this cost function to obtain an optimal mask and target solution. Our experiments on sample metal1 (M1) layouts show that the use of SMATO reduces the Process Manufacturability Index (PMI) by 15.4% compared to OPC, which further leads to 69% reduction in the number of layout hotspots. Additionally, such improvement is obtained at low average runtime overhead (5.5%). Compared to PWOPC, we observe 4.6% improvement in PMI at large (2.6X) improvement in runtime." @default.
• W3143665566 created "2021-04-13" @default.
• W3143665566 creator A5026895092 @default.
• W3143665566 creator A5039622472 @default.
• W3143665566 creator A5077851078 @default.
• W3143665566 date "2010-11-01" @default.
• W3143665566 modified "2023-09-25" @default.
• W3143665566 title "SMATO: Simultaneous mask and target optimization for improving lithographic process window" @default.
• W3143665566 cites W1967827416 @default.
• W3143665566 cites W1968303787 @default.
• W3143665566 cites W1980367469 @default.
• W3143665566 cites W1992381963 @default.
• W3143665566 cites W2000358180 @default.
• W3143665566 cites W2009296772 @default.
• W3143665566 cites W2021247129 @default.
• W3143665566 cites W2045932098 @default.
• W3143665566 cites W2046800778 @default.
• W3143665566 cites W2051050853 @default.
• W3143665566 cites W2061902717 @default.
• W3143665566 cites W2070386132 @default.
• W3143665566 cites W2091318718 @default.
• W3143665566 cites W2101335098 @default.
• W3143665566 cites W2116501445 @default.
• W3143665566 cites W2149425147 @default.
• W3143665566 doi "https://doi.org/10.1109/iccad.2010.5654341" @default.
• W3143665566 hasPublicationYear "2010" @default.
• W3143665566 type Work @default.
• W3143665566 sameAs 3143665566 @default.
• W3143665566 citedByCount "10" @default.
• W3143665566 countsByYear W31436655662012 @default.
• W3143665566 countsByYear W31436655662013 @default.
• W3143665566 countsByYear W31436655662014 @default.
• W3143665566 countsByYear W31436655662016 @default.
• W3143665566 countsByYear W31436655662017 @default.
• W3143665566 countsByYear W31436655662018 @default.
• W3143665566 countsByYear W31436655662020 @default.
• W3143665566 crossrefType "proceedings-article" @default.
• W3143665566 hasAuthorship W3143665566A5026895092 @default.
• W3143665566 hasAuthorship W3143665566A5039622472 @default.
• W3143665566 hasAuthorship W3143665566A5077851078 @default.
• W3143665566 hasConcept C104317684 @default.
• W3143665566 hasConcept C105487726 @default.
• W3143665566 hasConcept C111335779 @default.
• W3143665566 hasConcept C111919701 @default.
• W3143665566 hasConcept C11413529 @default.
• W3143665566 hasConcept C119599485 @default.
• W3143665566 hasConcept C120665830 @default.
• W3143665566 hasConcept C121332964 @default.
• W3143665566 hasConcept C127413603 @default.
• W3143665566 hasConcept C147764199 @default.
• W3143665566 hasConcept C162324750 @default.
• W3143665566 hasConcept C171250308 @default.
• W3143665566 hasConcept C185592680 @default.
• W3143665566 hasConcept C187736073 @default.
• W3143665566 hasConcept C192562407 @default.
• W3143665566 hasConcept C199360897 @default.
• W3143665566 hasConcept C204223013 @default.
• W3143665566 hasConcept C207789793 @default.
• W3143665566 hasConcept C24326235 @default.
• W3143665566 hasConcept C2524010 @default.
• W3143665566 hasConcept C2777441419 @default.
• W3143665566 hasConcept C2778820799 @default.
• W3143665566 hasConcept C2779227376 @default.
• W3143665566 hasConcept C33923547 @default.
• W3143665566 hasConcept C41008148 @default.
• W3143665566 hasConcept C49040817 @default.
• W3143665566 hasConcept C53524968 @default.
• W3143665566 hasConcept C55493867 @default.
• W3143665566 hasConcept C62064638 @default.
• W3143665566 hasConcept C63479239 @default.
• W3143665566 hasConcept C78371743 @default.
• W3143665566 hasConcept C93389723 @default.
• W3143665566 hasConcept C98045186 @default.
• W3143665566 hasConceptScore W3143665566C104317684 @default.
• W3143665566 hasConceptScore W3143665566C105487726 @default.
• W3143665566 hasConceptScore W3143665566C111335779 @default.
• W3143665566 hasConceptScore W3143665566C111919701 @default.
• W3143665566 hasConceptScore W3143665566C11413529 @default.
• W3143665566 hasConceptScore W3143665566C119599485 @default.
• W3143665566 hasConceptScore W3143665566C120665830 @default.
• W3143665566 hasConceptScore W3143665566C121332964 @default.
• W3143665566 hasConceptScore W3143665566C127413603 @default.
• W3143665566 hasConceptScore W3143665566C147764199 @default.
• W3143665566 hasConceptScore W3143665566C162324750 @default.
• W3143665566 hasConceptScore W3143665566C171250308 @default.
• W3143665566 hasConceptScore W3143665566C185592680 @default.
• W3143665566 hasConceptScore W3143665566C187736073 @default.
• W3143665566 hasConceptScore W3143665566C192562407 @default.
• W3143665566 hasConceptScore W3143665566C199360897 @default.
• W3143665566 hasConceptScore W3143665566C204223013 @default.
• W3143665566 hasConceptScore W3143665566C207789793 @default.
• W3143665566 hasConceptScore W3143665566C24326235 @default.
• W3143665566 hasConceptScore W3143665566C2524010 @default.
• W3143665566 hasConceptScore W3143665566C2777441419 @default.
• W3143665566 hasConceptScore W3143665566C2778820799 @default.
• W3143665566 hasConceptScore W3143665566C2779227376 @default.
• W3143665566 hasConceptScore W3143665566C33923547 @default.
• W3143665566 hasConceptScore W3143665566C41008148 @default.
• W3143665566 hasConceptScore W3143665566C49040817 @default.
• W3143665566 hasConceptScore W3143665566C53524968 @default.

• next