Matches in SemOpenAlex for { <https://semopenalex.org/work/W3144872550> ?p ?o ?g. }
Showing items 1 to 86 of
86
with 100 items per page.
- W3144872550 endingPage "578" @default.
- W3144872550 startingPage "573" @default.
- W3144872550 abstract "Pt has been investigated as a metal passivation material to achieve low-temperature Cu-Cu direct bonding process. With 10-nm Pt passivation layer capping on Cu surface, a good bonding surface with no oxides and small grain size can be obtained. During the low-temperature bonding process, Cu atoms diffuse through the passivation layer and form a new layer without any pretreatment. This bonding scheme with Pt passivation layer provides a solution for Cu low-temperature bonding, with excellent bonding strength, good electrical performance, and ability to endure temperature variation. In addition, both chip- and wafer-level bonding process have been successfully demonstrated, showing a high potential to be applied on 3-D integrated circuit (IC) and heterogeneous integration." @default.
- W3144872550 created "2021-04-13" @default.
- W3144872550 creator A5001293370 @default.
- W3144872550 creator A5001678219 @default.
- W3144872550 creator A5012325725 @default.
- W3144872550 creator A5030670785 @default.
- W3144872550 creator A5036194808 @default.
- W3144872550 creator A5040202030 @default.
- W3144872550 creator A5059632760 @default.
- W3144872550 creator A5061180661 @default.
- W3144872550 date "2021-04-01" @default.
- W3144872550 modified "2023-10-11" @default.
- W3144872550 title "Investigation of Low-Temperature Cu–Cu Direct Bonding With Pt Passivation Layer in 3-D Integration" @default.
- W3144872550 cites W1539725198 @default.
- W3144872550 cites W1582483847 @default.
- W3144872550 cites W1998820451 @default.
- W3144872550 cites W2079511937 @default.
- W3144872550 cites W2083260984 @default.
- W3144872550 cites W2086750013 @default.
- W3144872550 cites W2525416650 @default.
- W3144872550 cites W2564235302 @default.
- W3144872550 cites W2622148586 @default.
- W3144872550 cites W2756712186 @default.
- W3144872550 cites W2787811984 @default.
- W3144872550 cites W2950373877 @default.
- W3144872550 cites W80334592 @default.
- W3144872550 doi "https://doi.org/10.1109/tcpmt.2021.3069085" @default.
- W3144872550 hasPublicationYear "2021" @default.
- W3144872550 type Work @default.
- W3144872550 sameAs 3144872550 @default.
- W3144872550 citedByCount "13" @default.
- W3144872550 countsByYear W31448725502021 @default.
- W3144872550 countsByYear W31448725502022 @default.
- W3144872550 countsByYear W31448725502023 @default.
- W3144872550 crossrefType "journal-article" @default.
- W3144872550 hasAuthorship W3144872550A5001293370 @default.
- W3144872550 hasAuthorship W3144872550A5001678219 @default.
- W3144872550 hasAuthorship W3144872550A5012325725 @default.
- W3144872550 hasAuthorship W3144872550A5030670785 @default.
- W3144872550 hasAuthorship W3144872550A5036194808 @default.
- W3144872550 hasAuthorship W3144872550A5040202030 @default.
- W3144872550 hasAuthorship W3144872550A5059632760 @default.
- W3144872550 hasAuthorship W3144872550A5061180661 @default.
- W3144872550 hasConcept C159985019 @default.
- W3144872550 hasConcept C160671074 @default.
- W3144872550 hasConcept C171250308 @default.
- W3144872550 hasConcept C191897082 @default.
- W3144872550 hasConcept C192562407 @default.
- W3144872550 hasConcept C201414436 @default.
- W3144872550 hasConcept C2778071519 @default.
- W3144872550 hasConcept C2779133538 @default.
- W3144872550 hasConcept C2779227376 @default.
- W3144872550 hasConcept C33574316 @default.
- W3144872550 hasConcept C544153396 @default.
- W3144872550 hasConceptScore W3144872550C159985019 @default.
- W3144872550 hasConceptScore W3144872550C160671074 @default.
- W3144872550 hasConceptScore W3144872550C171250308 @default.
- W3144872550 hasConceptScore W3144872550C191897082 @default.
- W3144872550 hasConceptScore W3144872550C192562407 @default.
- W3144872550 hasConceptScore W3144872550C201414436 @default.
- W3144872550 hasConceptScore W3144872550C2778071519 @default.
- W3144872550 hasConceptScore W3144872550C2779133538 @default.
- W3144872550 hasConceptScore W3144872550C2779227376 @default.
- W3144872550 hasConceptScore W3144872550C33574316 @default.
- W3144872550 hasConceptScore W3144872550C544153396 @default.
- W3144872550 hasIssue "4" @default.
- W3144872550 hasLocation W31448725501 @default.
- W3144872550 hasOpenAccess W3144872550 @default.
- W3144872550 hasPrimaryLocation W31448725501 @default.
- W3144872550 hasRelatedWork W1921331855 @default.
- W3144872550 hasRelatedWork W1990895528 @default.
- W3144872550 hasRelatedWork W2006563554 @default.
- W3144872550 hasRelatedWork W2029050535 @default.
- W3144872550 hasRelatedWork W2043772030 @default.
- W3144872550 hasRelatedWork W2046610930 @default.
- W3144872550 hasRelatedWork W2279234954 @default.
- W3144872550 hasRelatedWork W2352335320 @default.
- W3144872550 hasRelatedWork W2369550861 @default.
- W3144872550 hasRelatedWork W4308123927 @default.
- W3144872550 hasVolume "11" @default.
- W3144872550 isParatext "false" @default.
- W3144872550 isRetracted "false" @default.
- W3144872550 magId "3144872550" @default.
- W3144872550 workType "article" @default.