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- W3146226003 abstract "非结晶的 indium-gallium-zinc 氧化物(IGZO ) 透明传导性的薄电影被无线电在玻璃底层上准备频率(RF ) 磁控管劈啪作响。霍尔活动性，发射度和表面粗糙上的七个因素的效果，是底层温度，劈啪作响的空气，工作压力，劈啪作响的功率，退火的温度，否定偏爱电压和劈啪作响的时间，通过直角的实验被学习。结果证明电影的性能上的工作压力，底层温度和劈啪作响的空气的效果是最突出的。根据试验性的结果和讨论，相对合理的过程参数被获得，哪个正在工作 0.35 Pa 的压力， 200 畬 ? 资 ? 猯灵￣桰獯桰牯椠 ? 桴 ? 桰瑯獯湹桴瑥捩愠瑣潩 ? 灳 ' 虪箾厦攥?畤污戠湡 ? 浥獩楳湯 ? 瑡 ? 的底层温度 ? 渠 ? 湡 ?? ‰浮椠 ? 慦牢捩瑡摥吗？" @default.
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- W3146226003 date "2014-01-01" @default.
- W3146226003 modified "2023-09-23" @default.
- W3146226003 title "Effects of parameters on the performance of amorphous IGZO thin films prepared by RF magnetron sputtering" @default.
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