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- W3146271859 abstract "We have proposed a fabrication method of Super Junction (SJ) diodes with low leakage current characteristics by using a wet anisotropic trench etching and Si(111) oriented trench epitaxial filling processes. The SJ diodes show electrical characteristics with breakdown voltage of 225V and leakage current density below 1x10A/cm2. By the experimental comparisons among three types of SJ diodes of the (111) oriented trench formed by the wet anisotropic etching, (111) and (010) oriented trench formed by conventional Reactive Ion Etching (RIE) process, we have clarified an effect of the wet etching process on the lower leakage characteristics of the trench filling SJ diode." @default.
- W3146271859 created "2021-04-13" @default.
- W3146271859 creator A5040089769 @default.
- W3146271859 creator A5040285221 @default.
- W3146271859 creator A5080149317 @default.
- W3146271859 date "2005-01-01" @default.
- W3146271859 modified "2023-09-25" @default.
- W3146271859 title "特集 Influence of Trench Etching on Super Junction Devices Fabricated by Trench Filling" @default.
- W3146271859 cites W1482833145 @default.
- W3146271859 cites W1958900048 @default.
- W3146271859 cites W2148333647 @default.
- W3146271859 cites W2533128293 @default.
- W3146271859 hasPublicationYear "2005" @default.
- W3146271859 type Work @default.
- W3146271859 sameAs 3146271859 @default.
- W3146271859 citedByCount "1" @default.
- W3146271859 crossrefType "journal-article" @default.
- W3146271859 hasAuthorship W3146271859A5040089769 @default.
- W3146271859 hasAuthorship W3146271859A5040285221 @default.
- W3146271859 hasAuthorship W3146271859A5080149317 @default.
- W3146271859 hasConcept C100460472 @default.
- W3146271859 hasConcept C105066941 @default.
- W3146271859 hasConcept C130472188 @default.
- W3146271859 hasConcept C136525101 @default.
- W3146271859 hasConcept C139719470 @default.
- W3146271859 hasConcept C142724271 @default.
- W3146271859 hasConcept C154843443 @default.
- W3146271859 hasConcept C155310634 @default.
- W3146271859 hasConcept C159985019 @default.
- W3146271859 hasConcept C162324750 @default.
- W3146271859 hasConcept C171250308 @default.
- W3146271859 hasConcept C192562407 @default.
- W3146271859 hasConcept C204787440 @default.
- W3146271859 hasConcept C2777042071 @default.
- W3146271859 hasConcept C2779227376 @default.
- W3146271859 hasConcept C33220542 @default.
- W3146271859 hasConcept C49040817 @default.
- W3146271859 hasConcept C71924100 @default.
- W3146271859 hasConcept C78434282 @default.
- W3146271859 hasConceptScore W3146271859C100460472 @default.
- W3146271859 hasConceptScore W3146271859C105066941 @default.
- W3146271859 hasConceptScore W3146271859C130472188 @default.
- W3146271859 hasConceptScore W3146271859C136525101 @default.
- W3146271859 hasConceptScore W3146271859C139719470 @default.
- W3146271859 hasConceptScore W3146271859C142724271 @default.
- W3146271859 hasConceptScore W3146271859C154843443 @default.
- W3146271859 hasConceptScore W3146271859C155310634 @default.
- W3146271859 hasConceptScore W3146271859C159985019 @default.
- W3146271859 hasConceptScore W3146271859C162324750 @default.
- W3146271859 hasConceptScore W3146271859C171250308 @default.
- W3146271859 hasConceptScore W3146271859C192562407 @default.
- W3146271859 hasConceptScore W3146271859C204787440 @default.
- W3146271859 hasConceptScore W3146271859C2777042071 @default.
- W3146271859 hasConceptScore W3146271859C2779227376 @default.
- W3146271859 hasConceptScore W3146271859C33220542 @default.
- W3146271859 hasConceptScore W3146271859C49040817 @default.
- W3146271859 hasConceptScore W3146271859C71924100 @default.
- W3146271859 hasConceptScore W3146271859C78434282 @default.
- W3146271859 hasLocation W31462718591 @default.
- W3146271859 hasOpenAccess W3146271859 @default.
- W3146271859 hasPrimaryLocation W31462718591 @default.
- W3146271859 hasRelatedWork W1489941049 @default.
- W3146271859 hasRelatedWork W1558464038 @default.
- W3146271859 hasRelatedWork W2048568474 @default.
- W3146271859 hasRelatedWork W2070597838 @default.
- W3146271859 hasRelatedWork W2089141660 @default.
- W3146271859 hasRelatedWork W2595714457 @default.
- W3146271859 hasRelatedWork W2612767608 @default.
- W3146271859 hasRelatedWork W2937208279 @default.
- W3146271859 hasRelatedWork W3134200397 @default.
- W3146271859 hasRelatedWork W3159270405 @default.
- W3146271859 hasRelatedWork W2084342795 @default.
- W3146271859 hasRelatedWork W2303391580 @default.
- W3146271859 hasRelatedWork W2815032362 @default.
- W3146271859 hasRelatedWork W2829771387 @default.
- W3146271859 hasRelatedWork W2846077374 @default.
- W3146271859 hasRelatedWork W2855862239 @default.
- W3146271859 hasRelatedWork W2863660513 @default.
- W3146271859 hasRelatedWork W2935095781 @default.
- W3146271859 hasRelatedWork W2960859592 @default.
- W3146271859 hasRelatedWork W3019994942 @default.
- W3146271859 isParatext "false" @default.
- W3146271859 isRetracted "false" @default.
- W3146271859 magId "3146271859" @default.
- W3146271859 workType "article" @default.