Matches in SemOpenAlex for { <https://semopenalex.org/work/W3146401868> ?p ?o ?g. }
Showing items 1 to 86 of
86
with 100 items per page.
- W3146401868 abstract "Fast and nondestructive determination of structural and material parameters of mass-spring-damper systems is a key issue in wafer level MEMS test. The knowledge of these parameters allows the selection of defective devices before the cost intensive packaging step and the control of the fabrication process. The proposed method addresses this problem with a non-contact measurement technique based on laser Doppler interferometry. Measured frequency response functions and natural frequencies obtained from finite element simulations are used to calculate structural dimensions and material properties of the device under test. On the example of MEMS scanner arrays for Hadamard transform optics, the method is demonstrated and results are validated by scanning electron microscopy. A mean error of 3 % between the two measurement techniques was observed, which is very promising considering a measurement duration of approximately 4 seconds per device. Techniques for efficient excitation of micromechanical structures in a broad frequency range are presented, as well as algorithms for the precise determination of natural frequencies and the detection of mode interchange." @default.
- W3146401868 created "2021-04-13" @default.
- W3146401868 creator A5071130193 @default.
- W3146401868 creator A5084174260 @default.
- W3146401868 date "2010-01-01" @default.
- W3146401868 modified "2023-10-08" @default.
- W3146401868 title "Resonant Mode Detection for Fast Determination of Structural and Material Parameters of MEMS" @default.
- W3146401868 cites W1500177640 @default.
- W3146401868 cites W1964234827 @default.
- W3146401868 cites W2046641306 @default.
- W3146401868 cites W2080060891 @default.
- W3146401868 cites W2171372399 @default.
- W3146401868 cites W2187216470 @default.
- W3146401868 hasPublicationYear "2010" @default.
- W3146401868 type Work @default.
- W3146401868 sameAs 3146401868 @default.
- W3146401868 citedByCount "1" @default.
- W3146401868 countsByYear W31464018682015 @default.
- W3146401868 crossrefType "journal-article" @default.
- W3146401868 hasAuthorship W3146401868A5071130193 @default.
- W3146401868 hasAuthorship W3146401868A5084174260 @default.
- W3146401868 hasConcept C120665830 @default.
- W3146401868 hasConcept C121332964 @default.
- W3146401868 hasConcept C127413603 @default.
- W3146401868 hasConcept C135628077 @default.
- W3146401868 hasConcept C160671074 @default.
- W3146401868 hasConcept C192562407 @default.
- W3146401868 hasConcept C195266298 @default.
- W3146401868 hasConcept C198394728 @default.
- W3146401868 hasConcept C24326235 @default.
- W3146401868 hasConcept C24890656 @default.
- W3146401868 hasConcept C2779751349 @default.
- W3146401868 hasConcept C37977207 @default.
- W3146401868 hasConcept C41008148 @default.
- W3146401868 hasConcept C49040817 @default.
- W3146401868 hasConcept C56529433 @default.
- W3146401868 hasConcept C62520636 @default.
- W3146401868 hasConcept C66938386 @default.
- W3146401868 hasConcept C76249512 @default.
- W3146401868 hasConcept C78736273 @default.
- W3146401868 hasConceptScore W3146401868C120665830 @default.
- W3146401868 hasConceptScore W3146401868C121332964 @default.
- W3146401868 hasConceptScore W3146401868C127413603 @default.
- W3146401868 hasConceptScore W3146401868C135628077 @default.
- W3146401868 hasConceptScore W3146401868C160671074 @default.
- W3146401868 hasConceptScore W3146401868C192562407 @default.
- W3146401868 hasConceptScore W3146401868C195266298 @default.
- W3146401868 hasConceptScore W3146401868C198394728 @default.
- W3146401868 hasConceptScore W3146401868C24326235 @default.
- W3146401868 hasConceptScore W3146401868C24890656 @default.
- W3146401868 hasConceptScore W3146401868C2779751349 @default.
- W3146401868 hasConceptScore W3146401868C37977207 @default.
- W3146401868 hasConceptScore W3146401868C41008148 @default.
- W3146401868 hasConceptScore W3146401868C49040817 @default.
- W3146401868 hasConceptScore W3146401868C56529433 @default.
- W3146401868 hasConceptScore W3146401868C62520636 @default.
- W3146401868 hasConceptScore W3146401868C66938386 @default.
- W3146401868 hasConceptScore W3146401868C76249512 @default.
- W3146401868 hasConceptScore W3146401868C78736273 @default.
- W3146401868 hasLocation W31464018681 @default.
- W3146401868 hasOpenAccess W3146401868 @default.
- W3146401868 hasPrimaryLocation W31464018681 @default.
- W3146401868 hasRelatedWork W112919544 @default.
- W3146401868 hasRelatedWork W1222257710 @default.
- W3146401868 hasRelatedWork W1981532855 @default.
- W3146401868 hasRelatedWork W1982292903 @default.
- W3146401868 hasRelatedWork W1991659066 @default.
- W3146401868 hasRelatedWork W2039710723 @default.
- W3146401868 hasRelatedWork W2069303732 @default.
- W3146401868 hasRelatedWork W2081378332 @default.
- W3146401868 hasRelatedWork W2086427195 @default.
- W3146401868 hasRelatedWork W2130906168 @default.
- W3146401868 hasRelatedWork W2165685200 @default.
- W3146401868 hasRelatedWork W2172130876 @default.
- W3146401868 hasRelatedWork W2291313741 @default.
- W3146401868 hasRelatedWork W2491883564 @default.
- W3146401868 hasRelatedWork W2571916169 @default.
- W3146401868 hasRelatedWork W2795546406 @default.
- W3146401868 hasRelatedWork W2810880069 @default.
- W3146401868 hasRelatedWork W2901451812 @default.
- W3146401868 hasRelatedWork W2923649581 @default.
- W3146401868 hasRelatedWork W2189280130 @default.
- W3146401868 isParatext "false" @default.
- W3146401868 isRetracted "false" @default.
- W3146401868 magId "3146401868" @default.
- W3146401868 workType "article" @default.