Matches in SemOpenAlex for { <https://semopenalex.org/work/W3146898825> ?p ?o ?g. }
- W3146898825 endingPage "9234" @default.
- W3146898825 startingPage "9228" @default.
- W3146898825 abstract "The electron-induced fragmentation mechanisms of two important EUV-photoresist monomers methyl isobutyrate and methacrylic acid are investigated in the film and gas-phases." @default.
- W3146898825 created "2021-04-13" @default.
- W3146898825 creator A5030574683 @default.
- W3146898825 creator A5031147529 @default.
- W3146898825 creator A5036222441 @default.
- W3146898825 creator A5036601179 @default.
- W3146898825 creator A5038315069 @default.
- W3146898825 creator A5042828154 @default.
- W3146898825 creator A5064307108 @default.
- W3146898825 creator A5073479060 @default.
- W3146898825 creator A5087318502 @default.
- W3146898825 date "2021-01-01" @default.
- W3146898825 modified "2023-10-03" @default.
- W3146898825 title "Electron-induced fragmentation mechanisms in organic monomers and their implications for photoresist optimization for EUV lithography" @default.
- W3146898825 cites W1857743476 @default.
- W3146898825 cites W1966117545 @default.
- W3146898825 cites W1974448942 @default.
- W3146898825 cites W1978621375 @default.
- W3146898825 cites W1980378632 @default.
- W3146898825 cites W1988091937 @default.
- W3146898825 cites W1992070201 @default.
- W3146898825 cites W1998450850 @default.
- W3146898825 cites W2017955169 @default.
- W3146898825 cites W2018674598 @default.
- W3146898825 cites W2023271753 @default.
- W3146898825 cites W2040198648 @default.
- W3146898825 cites W2049997508 @default.
- W3146898825 cites W2063424552 @default.
- W3146898825 cites W2067227629 @default.
- W3146898825 cites W2078511427 @default.
- W3146898825 cites W2079309625 @default.
- W3146898825 cites W2081222985 @default.
- W3146898825 cites W2092157292 @default.
- W3146898825 cites W2111937823 @default.
- W3146898825 cites W2126099422 @default.
- W3146898825 cites W2126458928 @default.
- W3146898825 cites W2143981217 @default.
- W3146898825 cites W2148284063 @default.
- W3146898825 cites W2234552091 @default.
- W3146898825 cites W2411936575 @default.
- W3146898825 cites W2631295260 @default.
- W3146898825 cites W2781815180 @default.
- W3146898825 cites W2982420644 @default.
- W3146898825 cites W3011258524 @default.
- W3146898825 cites W3015538487 @default.
- W3146898825 doi "https://doi.org/10.1039/d1cp00065a" @default.
- W3146898825 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/33885061" @default.
- W3146898825 hasPublicationYear "2021" @default.
- W3146898825 type Work @default.
- W3146898825 sameAs 3146898825 @default.
- W3146898825 citedByCount "4" @default.
- W3146898825 countsByYear W31468988252022 @default.
- W3146898825 countsByYear W31468988252023 @default.
- W3146898825 crossrefType "journal-article" @default.
- W3146898825 hasAuthorship W3146898825A5030574683 @default.
- W3146898825 hasAuthorship W3146898825A5031147529 @default.
- W3146898825 hasAuthorship W3146898825A5036222441 @default.
- W3146898825 hasAuthorship W3146898825A5036601179 @default.
- W3146898825 hasAuthorship W3146898825A5038315069 @default.
- W3146898825 hasAuthorship W3146898825A5042828154 @default.
- W3146898825 hasAuthorship W3146898825A5064307108 @default.
- W3146898825 hasAuthorship W3146898825A5073479060 @default.
- W3146898825 hasAuthorship W3146898825A5087318502 @default.
- W3146898825 hasBestOaLocation W31468988254 @default.
- W3146898825 hasConcept C105487726 @default.
- W3146898825 hasConcept C111919701 @default.
- W3146898825 hasConcept C121332964 @default.
- W3146898825 hasConcept C134406635 @default.
- W3146898825 hasConcept C147120987 @default.
- W3146898825 hasConcept C159985019 @default.
- W3146898825 hasConcept C162996421 @default.
- W3146898825 hasConcept C166940927 @default.
- W3146898825 hasConcept C171250308 @default.
- W3146898825 hasConcept C177409738 @default.
- W3146898825 hasConcept C185592680 @default.
- W3146898825 hasConcept C191015642 @default.
- W3146898825 hasConcept C192562407 @default.
- W3146898825 hasConcept C200274948 @default.
- W3146898825 hasConcept C204223013 @default.
- W3146898825 hasConcept C2779227376 @default.
- W3146898825 hasConcept C41008148 @default.
- W3146898825 hasConcept C41794268 @default.
- W3146898825 hasConcept C49040817 @default.
- W3146898825 hasConcept C521977710 @default.
- W3146898825 hasConcept C53524968 @default.
- W3146898825 hasConcept C62520636 @default.
- W3146898825 hasConceptScore W3146898825C105487726 @default.
- W3146898825 hasConceptScore W3146898825C111919701 @default.
- W3146898825 hasConceptScore W3146898825C121332964 @default.
- W3146898825 hasConceptScore W3146898825C134406635 @default.
- W3146898825 hasConceptScore W3146898825C147120987 @default.
- W3146898825 hasConceptScore W3146898825C159985019 @default.
- W3146898825 hasConceptScore W3146898825C162996421 @default.
- W3146898825 hasConceptScore W3146898825C166940927 @default.
- W3146898825 hasConceptScore W3146898825C171250308 @default.
- W3146898825 hasConceptScore W3146898825C177409738 @default.
- W3146898825 hasConceptScore W3146898825C185592680 @default.
- W3146898825 hasConceptScore W3146898825C191015642 @default.