Matches in SemOpenAlex for { <https://semopenalex.org/work/W3147682912> ?p ?o ?g. }
Showing items 1 to 73 of
73
with 100 items per page.
- W3147682912 abstract "In this work,a focused ion beam(FIB)-scanning electron microscopy(SEM) dual beam system was successfully built by integrating a FIB column and a graphics generator onto a SEM.Real-time observation can be realized by SEM during the process of FIB milling.All kinds of graphics at nanoscale regime,such as lines,characters,and pictures,were achieved under the control of graphics generator.Moreover,the FIB milling line width can be reduced nearly 27% by the introduction of simultaneous electron beam,and a line width as small as 10 nm was achieved.The numerical analysis indicates that the significant improvement on line width is induced by the Coulomb interaction between the electrons and ions." @default.
- W3147682912 created "2021-04-13" @default.
- W3147682912 creator A5009768180 @default.
- W3147682912 date "2012-01-01" @default.
- W3147682912 modified "2023-09-23" @default.
- W3147682912 title "Focused ion beam built-up on scanning electron microscopy with increased milling precision" @default.
- W3147682912 hasPublicationYear "2012" @default.
- W3147682912 type Work @default.
- W3147682912 sameAs 3147682912 @default.
- W3147682912 citedByCount "0" @default.
- W3147682912 crossrefType "journal-article" @default.
- W3147682912 hasAuthorship W3147682912A5009768180 @default.
- W3147682912 hasConcept C109486029 @default.
- W3147682912 hasConcept C120665830 @default.
- W3147682912 hasConcept C121332964 @default.
- W3147682912 hasConcept C145148216 @default.
- W3147682912 hasConcept C147120987 @default.
- W3147682912 hasConcept C159985019 @default.
- W3147682912 hasConcept C161866238 @default.
- W3147682912 hasConcept C163258240 @default.
- W3147682912 hasConcept C168834538 @default.
- W3147682912 hasConcept C171250308 @default.
- W3147682912 hasConcept C192562407 @default.
- W3147682912 hasConcept C193016168 @default.
- W3147682912 hasConcept C26771246 @default.
- W3147682912 hasConcept C2779227376 @default.
- W3147682912 hasConcept C2780992000 @default.
- W3147682912 hasConcept C48736558 @default.
- W3147682912 hasConcept C62520636 @default.
- W3147682912 hasConcept C95312477 @default.
- W3147682912 hasConceptScore W3147682912C109486029 @default.
- W3147682912 hasConceptScore W3147682912C120665830 @default.
- W3147682912 hasConceptScore W3147682912C121332964 @default.
- W3147682912 hasConceptScore W3147682912C145148216 @default.
- W3147682912 hasConceptScore W3147682912C147120987 @default.
- W3147682912 hasConceptScore W3147682912C159985019 @default.
- W3147682912 hasConceptScore W3147682912C161866238 @default.
- W3147682912 hasConceptScore W3147682912C163258240 @default.
- W3147682912 hasConceptScore W3147682912C168834538 @default.
- W3147682912 hasConceptScore W3147682912C171250308 @default.
- W3147682912 hasConceptScore W3147682912C192562407 @default.
- W3147682912 hasConceptScore W3147682912C193016168 @default.
- W3147682912 hasConceptScore W3147682912C26771246 @default.
- W3147682912 hasConceptScore W3147682912C2779227376 @default.
- W3147682912 hasConceptScore W3147682912C2780992000 @default.
- W3147682912 hasConceptScore W3147682912C48736558 @default.
- W3147682912 hasConceptScore W3147682912C62520636 @default.
- W3147682912 hasConceptScore W3147682912C95312477 @default.
- W3147682912 hasOpenAccess W3147682912 @default.
- W3147682912 hasRelatedWork W161454418 @default.
- W3147682912 hasRelatedWork W1966970625 @default.
- W3147682912 hasRelatedWork W1998463295 @default.
- W3147682912 hasRelatedWork W2044359293 @default.
- W3147682912 hasRelatedWork W2060421397 @default.
- W3147682912 hasRelatedWork W2086389790 @default.
- W3147682912 hasRelatedWork W2086986144 @default.
- W3147682912 hasRelatedWork W2109209616 @default.
- W3147682912 hasRelatedWork W2120389280 @default.
- W3147682912 hasRelatedWork W2167302603 @default.
- W3147682912 hasRelatedWork W2343671985 @default.
- W3147682912 hasRelatedWork W2368326056 @default.
- W3147682912 hasRelatedWork W2464964244 @default.
- W3147682912 hasRelatedWork W249683114 @default.
- W3147682912 hasRelatedWork W2756404518 @default.
- W3147682912 hasRelatedWork W2798336989 @default.
- W3147682912 hasRelatedWork W2241336465 @default.
- W3147682912 hasRelatedWork W2736577313 @default.
- W3147682912 hasRelatedWork W2816117979 @default.
- W3147682912 hasRelatedWork W2845540399 @default.
- W3147682912 isParatext "false" @default.
- W3147682912 isRetracted "false" @default.
- W3147682912 magId "3147682912" @default.
- W3147682912 workType "article" @default.