FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W3147804793> ?p ?o ?g. }

• W3147804793 abstract "We succeeded in achieving inclined sidewalls in a positive-tone photoresist structure by adjusting the focus offsets in a projection ultraviolet (UV) lithography system. In our experiments, highly precise patterns on Ni-electroformed mold were replicated from a photoresist master. The practicality of the mold was then evaluated by thermal nanoimprint experiments on polycarbonate (PC). When the focus offsets became small by moving the UV image plane (defined by wafer surface) closer to the lens the inclined angles of the photoresist walls increased. In this work, the release force was measured using a desktop nanoimprint system equipped with a load cell that mea- sured not only the compression power but also the tensile force in the de-molding process. Starting from the glass transition temperature Tg (144C) of PC, the heating tem- perature in the molding process was changed by increments of 10C resulting in Tg ? 10, Tg ? 20, and Tg ? 30C. The result showed that the release force decreased with increasing incline angles. It was observed that the more inclined the sidewalls of the mold pattern were, further small the release forces became, and the mold pattern became to be defended from deformation." @default.
• W3147804793 created "2021-04-13" @default.
• W3147804793 creator A5017369756 @default.
• W3147804793 creator A5025435106 @default.
• W3147804793 date "2010-01-01" @default.
• W3147804793 modified "2023-09-24" @default.
• W3147804793 title "Inclination of mold pattern's sidewalls by combined technique with photolithography at defocus-positions and electroforming" @default.
• W3147804793 cites W1965133676 @default.
• W3147804793 cites W1992311512 @default.
• W3147804793 cites W1994646422 @default.
• W3147804793 cites W1997528804 @default.
• W3147804793 cites W2013325726 @default.
• W3147804793 cites W2022948920 @default.
• W3147804793 cites W2026159643 @default.
• W3147804793 cites W2033095458 @default.
• W3147804793 cites W2040569498 @default.
• W3147804793 cites W2062072796 @default.
• W3147804793 cites W2062074587 @default.
• W3147804793 cites W2062347298 @default.
• W3147804793 cites W2072518504 @default.
• W3147804793 cites W2091376339 @default.
• W3147804793 cites W2097574660 @default.
• W3147804793 cites W2121917973 @default.
• W3147804793 cites W2128523187 @default.
• W3147804793 cites W2148935287 @default.
• W3147804793 cites W240993141 @default.
• W3147804793 cites W2413618348 @default.
• W3147804793 cites W2542718459 @default.
• W3147804793 cites W2104691660 @default.
• W3147804793 hasPublicationYear "2010" @default.
• W3147804793 type Work @default.
• W3147804793 sameAs 3147804793 @default.
• W3147804793 citedByCount "0" @default.
• W3147804793 crossrefType "journal-article" @default.
• W3147804793 hasAuthorship W3147804793A5017369756 @default.
• W3147804793 hasAuthorship W3147804793A5025435106 @default.
• W3147804793 hasConcept C105487726 @default.
• W3147804793 hasConcept C120665830 @default.
• W3147804793 hasConcept C121332964 @default.
• W3147804793 hasConcept C134406635 @default.
• W3147804793 hasConcept C136525101 @default.
• W3147804793 hasConcept C137808972 @default.
• W3147804793 hasConcept C142724271 @default.
• W3147804793 hasConcept C159985019 @default.
• W3147804793 hasConcept C160671074 @default.
• W3147804793 hasConcept C171250308 @default.
• W3147804793 hasConcept C192562407 @default.
• W3147804793 hasConcept C204366326 @default.
• W3147804793 hasConcept C204787440 @default.
• W3147804793 hasConcept C2776540798 @default.
• W3147804793 hasConcept C2777046567 @default.
• W3147804793 hasConcept C2779227376 @default.
• W3147804793 hasConcept C2780566776 @default.
• W3147804793 hasConcept C53524968 @default.
• W3147804793 hasConcept C67558686 @default.
• W3147804793 hasConcept C71924100 @default.
• W3147804793 hasConceptScore W3147804793C105487726 @default.
• W3147804793 hasConceptScore W3147804793C120665830 @default.
• W3147804793 hasConceptScore W3147804793C121332964 @default.
• W3147804793 hasConceptScore W3147804793C134406635 @default.
• W3147804793 hasConceptScore W3147804793C136525101 @default.
• W3147804793 hasConceptScore W3147804793C137808972 @default.
• W3147804793 hasConceptScore W3147804793C142724271 @default.
• W3147804793 hasConceptScore W3147804793C159985019 @default.
• W3147804793 hasConceptScore W3147804793C160671074 @default.
• W3147804793 hasConceptScore W3147804793C171250308 @default.
• W3147804793 hasConceptScore W3147804793C192562407 @default.
• W3147804793 hasConceptScore W3147804793C204366326 @default.
• W3147804793 hasConceptScore W3147804793C204787440 @default.
• W3147804793 hasConceptScore W3147804793C2776540798 @default.
• W3147804793 hasConceptScore W3147804793C2777046567 @default.
• W3147804793 hasConceptScore W3147804793C2779227376 @default.
• W3147804793 hasConceptScore W3147804793C2780566776 @default.
• W3147804793 hasConceptScore W3147804793C53524968 @default.
• W3147804793 hasConceptScore W3147804793C67558686 @default.
• W3147804793 hasConceptScore W3147804793C71924100 @default.
• W3147804793 hasLocation W31478047931 @default.
• W3147804793 hasOpenAccess W3147804793 @default.
• W3147804793 hasPrimaryLocation W31478047931 @default.
• W3147804793 hasRelatedWork W1697386134 @default.
• W3147804793 hasRelatedWork W1900826820 @default.
• W3147804793 hasRelatedWork W1970439378 @default.
• W3147804793 hasRelatedWork W1988116454 @default.
• W3147804793 hasRelatedWork W2002171536 @default.
• W3147804793 hasRelatedWork W2003121805 @default.
• W3147804793 hasRelatedWork W2038487807 @default.
• W3147804793 hasRelatedWork W2039995855 @default.
• W3147804793 hasRelatedWork W2045261950 @default.
• W3147804793 hasRelatedWork W2058807520 @default.
• W3147804793 hasRelatedWork W2085601976 @default.
• W3147804793 hasRelatedWork W2142003864 @default.
• W3147804793 hasRelatedWork W2243635970 @default.
• W3147804793 hasRelatedWork W2321043722 @default.
• W3147804793 hasRelatedWork W2463841375 @default.
• W3147804793 hasRelatedWork W2823802034 @default.
• W3147804793 hasRelatedWork W2827148375 @default.
• W3147804793 hasRelatedWork W2857009179 @default.
• W3147804793 hasRelatedWork W2868537515 @default.
• W3147804793 hasRelatedWork W3148065637 @default.
• W3147804793 isParatext "false" @default.

• next